欢迎访问沈阳真空杂志社 Email Alert    RSS服务

真空 ›› 2019, Vol. 56 ›› Issue (6): 12-15.doi: 10.13385/j.cnki.vacuum.2019.06.03

• • 上一篇    下一篇

新型同轴电极结构碳纳米管场发射电离计

何剑锋, 黄卫军, 董长昆   

  1. 温州大学 微纳结构与光电器件研究所,浙江 温州 325035
  • 收稿日期:2019-04-13 出版日期:2019-11-25 发布日期:2019-12-03
  • 通讯作者: 董长昆,教授,博导。
  • 作者简介:何剑锋（1992-）,男,安徽省六安市人,硕士。
  • 基金资助:
    国家科学基金资助,项目号：61620106006

A New Carbon Nanotube Field Emission Ionization Gauge With Coaxial Electrodes

HE Jian-feng, HUANG Wei-jun, DONG Chang-kun   

  1. Institute of Micro-Nano Structures & Optoelectronics, Wenzhou University, Wenzhou 325035, China
  • Received:2019-04-13 Online:2019-11-25 Published:2019-12-03

摘要： 本文以碳纳米管（CNT）作为阴极电子源设计一种新型的冷阴极电离真空计结构,结构包括场发射电子源、阳极和离子收集极,阳极和离子收集极为同轴圆环结构。利用热化学气相沉积法在金属基底上直接生长碳纳米管,分别制备了4mm×5mm矩形和直径0.1mm圆形两种阴极发射面。碳纳米管阴极具有优异的场发射性能,开启电场1.70 V/μm。在氮气环境下,分别对不同阴极真空电离计结构的真空测量性能进行了研究,真空计在10-7到10-3Pa区间归一化电流（Ii/Ia）与压强表现出良好的线性关系,矩形和圆形发射面阴极对应的真空计其测量灵敏度分别是3.1×10-2Pa-1和1.3×10-2Pa-1。

关键词: 碳纳米管, 场发射, 电离真空计, 同轴电极, 灵敏度

Abstract: In this paper, a new type of cold cathode ionization vacuum gauge with carbon nanotube(CNT) field emission cathode is designed. The device consists of a field emission cathode, an anode grid, and an ion collector, with the anode and ion collector coaxial arranged. The carbon nanotubes were grown directly on the metal substrate by chemical vapor deposition, and two types of cathodes with 4mm×5mm rectangle and Φ 0.1mm circular emission surfaces were investigated respectively. The carbon nanotube cathodes presented excellent field emission performance with turn-on electric field of 1.70 V/μm. In the nitrogen environment, the vacuum measurement performance of the gauges based on two kinds of cathodes is investigated respectively, the normalized current (Ii/Ia) range and the pressure show a good linear relationship from 10-7 to 10-3 Pa, and the measurement sensitivities of the gauges corresponding to the cathodes of rectangular and circular emission areas are 3.1×10-2 Pa-1 and 1.3×10-2 Pa-1, respectively.

Key words: carbon nanotube, field emission, ionization gauge, coaxial electrode, sensitivity

中图分类号: 

  • TN304
[1] Su J, Guo D Z, Zhang G M.Miniature cold cathode ionization gauge based on composite films of carbon nanotubes and MgO nanoparticles[C]. Vacuum Nanoelectronics Conference (IVNC), 2012 25th International. IEEE, 2012.
[2] Qian X, Tucker A, Gidcumb E et al. High resolution stationary digital breast tomosynthesis using distributed carbon nanotube x-ray source array[J]. Medical Physics, 2012, 39(4):2090-2099.
[3] Sheridan S, Bardwell W M, Morse A D, et al.A Carbon Nano Tube electron impact ionisation source for low-power, compact spacecraft mass spectrometers[J].Advances in Space Research,2012,49(8):1245-1252.
[4] Li D T, Wang Y J, Cheng Y J, et al.An overview of ionization gauges with carbon nanotube cathodes[J]. Journal of Physics D: Applied Physics;2015,47(48):473001.
[5] Dong C,Myneni G R.Carbon nanotube electron source basedionization vacuum gauge[J]. Applied physics letters,2004,4(26):5443-5445.
[6] Zhang J, Li D T, Zhao Y Y, et al.Wide-range vacuum measurements from MWNT field emitters grown directly on stainless steel substrates[J]. Nanoscale research letters,2016,11(1):5.
[7] Liu H, Nakahara H, Uemura S, et al.Ionization vacuum gauge with a carbon nanotube field electron emitter combined with a shield electrode[J].Vacuum.2010,84:713-717.
[8] Sheng L M, Liu P, Wei Y, et al.A saddle-field gauge with carbon nanotube field emitters[J]. Diamond & Related Materials,2005,14(10):1695-1699.
[9] 陈丕瑾. 真空技术的科学基础[M].北京:国防工业出版社,1987:533-539.
[10] Huang J X, Jun C, Deng S Z, et al.Bayard-Alpert ionization gauge using carbon-nanotube cold cathode[J]. Journal of Vacuum Science and Technology B,2007,25(2):651-654.
[11] Suto H, Fujll S, Yoshihara K, et al.Fabrication of cold cathode ionization gauge using screen-printed carbon nanotube field electron emitter[J]. Japanese Journal of Applied Physics, 2008,47(4):2032-2035.
[12] Domingo C, Santoro G .Raman spectroscopy of carbon nanotubes[J]. Optica Pura y Aplicada, 2007, 40(2):175-186.
[13] Jean-Marc Bonard, Hannes Kind, Thomas S, et al.Field emission from carbon nanotubes: the first five years[J].Solid-State Electronics, 2001 , 45(6):893-914.
[14] Redhead P A, Hobson J P, Kornelsen E V.The physical basis of ultrahigh vacuum[M]. Chapman and Hall Ltd., London, 1968.
[1] 杨威, 魏贤龙. 片上电子源的研究现状（一）*[J]. 真空, 2019, 56(6): 16-26.
[2] 李建, 童洪辉, 但敏, 金凡亚, 王坤, 陈伦江. 场致发射电子源的应用及其研究进展[J]. 真空, 2019, 56(3): 27-31.
[3] 李得天, 成永军, 张虎忠, 孙雯君, 王永军, 孙 健, 李 刚, 裴晓强. 碳纳米管场发射阴极制备及其应用研究[J]. 真空, 2018, 55(5): 1-9.
[4] 周彬彬, 张 建, 何剑锋, 董长昆. 基于 CVD 直接生长法的碳纳米管场发射阴极[J]. 真空, 2018, 55(5): 10-14.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
[1] 李得天, 成永军, 张虎忠, 孙雯君, 王永军, 孙 健, 李 刚, 裴晓强. 碳纳米管场发射阴极制备及其应用研究[J]. 真空, 2018, 55(5): 1 -9 .
[2] 周彬彬, 张 建, 何剑锋, 董长昆. 基于 CVD 直接生长法的碳纳米管场发射阴极[J]. 真空, 2018, 55(5): 10 -14 .
[3] 李志胜. 空间环境下超大型红外定标用辐射屏蔽门的研制[J]. 真空, 2018, 55(5): 66 -70 .
[4] 郑 列, 李 宏. 200kV/2mA 连续可调直流高压发生器的设计[J]. 真空, 2018, 55(6): 10 -13 .
[5] 柴晓彤, 汪 亮, 王永庆, 刘明昆, 刘星洲, 干蜀毅. 基于 STM32F103 单片机的单泵运行参数数据采集系统[J]. 真空, 2018, 55(5): 15 -18 .
[6] 孙立志, 闫荣鑫, 李天野, 贾瑞金, 李 征, 孙立臣, 王 勇, 王 健, 张 强. 放样氙气在大型收集室内分布规律研究[J]. 真空, 2018, 55(5): 38 -41 .
[7] 黄 思 , 王学谦 , 莫宇石 , 张展发 , 应 冰 . 液环压缩机性能相似定律的实验研究[J]. 真空, 2018, 55(5): 42 -45 .
[8] 纪 明, 孙 亮, 杨敏勃. 一种用于对月球样品自动密封锁紧的设计[J]. 真空, 2018, 55(6): 24 -27 .
[9] 李民久, 熊 涛, 姜亚南, 贺岩斌, 陈庆川. 基于双管正激式变换器的金属表面去毛刺 20kV 高压脉冲电源[J]. 真空, 2018, 55(5): 19 -24 .
[10] 刘燕文, 孟宪展, 田 宏, 李 芬, 石文奇, 朱 虹, 谷 兵, 王小霞 . 空间行波管极高真空的获得与测量[J]. 真空, 2018, 55(5): 25 -28 .
辽ICP备18010011号-1
版权所有 © 2018 《真空》编辑部
地址：沈阳市沈河区万柳塘路2号　 邮编：110042　 电话：（024）24134406 24110136 24121929　 传真：（024） 24121929　E-mail: zkzk1964@126.com
本系统由北京玛格泰克科技发展有限公司设计开发