@article{丁孙安:60, author = {丁孙安, 杨辉}, title = {纳米真空互联大装置(Nano-X)及其应用进展*}, publisher = {真空}, year = {2019}, journal = {真空}, volume = {56}, number = {6}, eid = {60}, numpages = {3}, pages = {60}, keywords = {纳米;表面污染;真空环境;真空互联大装置;重要进展}, url = {http://www.vacjour.com/CN/abstract/article_131.shtml}, doi = {10.13385/j.cnki.vacuum.2019.06.11} }