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VACUUM ›› 2022, Vol. 59 ›› Issue (4): 12-17.doi: 10.13385/j.cnki.vacuum.2022.04.03

• Measurement and Control • Previous Articles     Next Articles

Study on the Calibration Factor in Quantitative Analysis of Trace Gases D2 by Mass Spectrometer

LI Hai-yang1,2, ZHANG Zhan-wen1, LIU Mei-fang1, LUAN Xu1, SHI Rui-ting1, YI Yong1   

  1. 1. Laser Fusion Research Center, CAEP, Mianyang 621900, China;
    2. School of Materials Science and Engineering, Southwest University of Science and Technology, Mianyang 621000, China
  • Received:2021-07-04 Online:2022-07-25 Published:2022-08-09

Abstract: Through the calibration chamber and vacuum tube installed on the intake pipe of the mass spectrometer, the trace gas with the same content range as the gas in microsphere can be obtained. The precision of quantitative analysis of trace gases by mass spectrometer and the effect of measured deuterium pressure on the calibration factor of D2 were studied. The results show that the precision of the quadrupole mass spectrometer is high, and the relative standard deviation of the 10 repeated measurements under different pressures is less than 0.004. The mass spectrometer has a high stability within one month after calibration, and it has a high accuracy with the quantitative analysis error is less than 1%. The concentration calibration factors for D2 and Ar varied no more than 3% within one year, while the pressure calibration factors for D2 varied more than 8% within one year. The pressure calibration factor η of D2 is inversely proportional to the pressure P1 of the measured deuterium gas, and there is a good linear relationship between η and logP1, which has a high stability in half a year.

Key words: Science and Engineering, Southwest University of Science and Technology, Mianyang 621000, China

CLC Number: 

  • O6-33
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