真空 ›› 2019, Vol. 56 ›› Issue (1): 52-55.doi: 10.13385/j.cnki.vacuum.2019.01.11
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王春明,张明达,苏玉萍
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作者简介:
WANG Chun-ming, ZHANG Ming-da, SU Yu-ping
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摘要: 本文首先浅述了氦质谱检漏技术的原理和喷吹检漏法,并以真空应用设备中的真空炉为例,针 对其在实际生产中常见的几种泄漏问题进行了细致分析并制定了解决方法。
关键词: 真空应用设备, 真空检漏方法, 氦质谱检漏仪, 喷吹检漏法
Abstract: In this paper, the principle of the leak detection technology of helium mass spectrometer and blowing leak detection method are briefly described. Taking the vacuum furnace as an example, several common leakage problems in practical production were analyzed in detail and corresponding solutions were made.
Key words: vacuum application equipment, vacuum leak detection method, helium mass spectrometer leak detector, blowing leak detection method
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王春明, 张明达, 苏玉萍. 真空应用设备检漏方法的探讨[J]. 真空, 2019, 56(1): 52-55.
WANG Chun-ming, ZHANG Ming-da, SU Yu-ping. Discussion on leak detection method of vacuum application equipment[J]. VACUUM, 2019, 56(1): 52-55.
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http://www.vacjour.com/CN/Y2019/V56/I1/52
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