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真空 ›› 2019, Vol. 56 ›› Issue (2): 51-56.doi: 10.13385/j.cnki.vacuum.2019.02.10

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小型化磁质谱仪离子源的模拟及优化设计

张礼朋1, 董猛2, 成永军2, 吴海燕1, 钱洁1, 张曙光1, 张英军1, 葛赛金1, 李晓旭1   

  1. 1.苏州大学机电工程学院,江苏 苏州 215021;
    2.兰州空间技术物理研究所 真空技术与物理重点实验室,甘肃 兰州 730000
  • 收稿日期:2018-07-03 出版日期:2019-03-25 发布日期:2019-04-18
  • 通讯作者: 李晓旭,副教授。
  • 作者简介:张礼朋（1993-）,男,江苏省盐城市滨海县人,硕士。
  • 基金资助:
    国家重点研发计划资助项目（2016YFF0203704）

Simulation and optimization of electron impact ion source for miniaturized magnetic mass spectrometer

ZHANG Li-peng1, DONG Meng2, CHENG Yong-jun2, WU Hai-yan1, QIAN Jie1, ZHANG Shu-guang1, ZHANG Ying-jun1, GE Sai-jin1, LI Xiao-xu1   

  1. 1.School of Mechanical and Electrical Engineering, Soochow University, Suzhou 215021, China;
    2.Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
  • Received:2018-07-03 Online:2019-03-25 Published:2019-04-18

摘要： 电子轰击离子源（Electron Impact Ion Source,EI源）作为小型化磁质谱仪的核心部件之一,其性能指标直接影响质谱仪器的质量分辨率与灵敏度。本文对小型化EI源的结构和电压驱动方式进行了改进和优化,旨在提升EI源的综合性能。采用离子光学模拟软件simion-8.0构建了小型化EI源的三维模型,重点研究几何参数、离子推斥极结构以及驱动EI源的电压参数对离子聚焦性能和离子传输效率的影响。通过模拟离子的运动轨迹,得到离子的运动参数,同时利用相空间法,分析EI源的离子聚焦效果和离子传输效率。理论模拟结果表明：当聚焦极与电离室距离S1为1.2mm,主狭缝与聚焦极距离S2与S1的比值为1.6,主狭缝缝宽S3为2mm,推斥极为圆弧结构,且聚焦透镜和主狭缝透镜通过扫描高压恒压跟踪驱动方式时,离子的位置聚焦半径小于0.08mm,离子传输效率可达到99%以上。研究表明：经过几何参数、推斥极结构优化和电压驱动方式改进后的EI源,可大幅提高离子传输效率,提升聚焦效果,并能在全质量范围内保持离子聚焦性能稳定,上述特性使其在小型化磁质谱仪开发中具有显著优势。

关键词: 电子轰击离子源, 离子推斥极, 恒压跟踪, 聚焦性能, 离子传输效率

Abstract: Electron Impact(EI) ion source is a core component for the miniaturized magnetic mass spectrometer, and its performance has a great impact on the mass resolution and sensitivity of the instrument. In this study, the structure of ion repeller electrode was optimized and the voltage driving method was improved to enhance the overall performance of the EI source. Three-dimensional model of the miniaturized EI source was constructed using the ion simulation software simion-8.0, and the simulation was focused on investigating the influence of geometric parameters, ion repeller shape and the electric parameters on the ion focusing performance and ion transfer efficiency. By simulating the trajectory of ions, the ion motion parameters were obtained. At the same time, the ion focusing effect and ion transfer efficiency of the EI source were analyzed using the phase space method. The theoretical simulation results show that the ion's position focusing radius was less than 0.08 mm and ion transfer efficiency of over 99% were achieved when S1=1.2mm, S2/S1=1.6, S3=2mm, ion repeller was arc shape and the ion focusing lens and the main slit were driven by the high voltage and constant voltage tracking method. The ion transfer efficiency and the ion focusing performance could be greatly improved when the ion repeller structure and the voltage driving method were improved. Furthermore, high ion focusing performance could be maintained during the whole mass range. The optimized EI source could greatly improve the sensitivity and mass resolution of miniaturized magnetic mass spectrometer. Although we only investigated the performance of geometric parameters and repeller structure and electric parameters by simulation, the achievements would be helpful and instructional for further experiments and study.

Key words: electron impact ion source, ion repeller electrode, constant voltage tracking, ion focusing performance, ion transfer efficiency

中图分类号: 

  • TB773
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