真空 ›› 2019, Vol. 56 ›› Issue (4): 19-23.doi: 10.13385/j.cnki.vacuum.2019.04.05
张子欣, 刘忠伟, 杨丽珍, 陈强
ZHANG Zi-xin, LIU Zhong-wei, YANG Li-zhen, CHEN Qiang
摘要： 采用等离子体辅助原子层沉积的方法,通过振动流化床,在硅基氮化物荧光粉表面保形地包覆了氧化铝薄膜。分别用傅立叶红外光谱（FTIR）、扫描电子显微镜（SEM）、透射电子显微镜（TEM）和pH计对包覆前后荧光粉的表面成分、形貌和耐水性进行了测试。最后,还用荧光光谱仪对包覆前后荧光粉的PL发光进行了表征。结果表明,氧化铝被保形地包覆在荧光粉颗粒表面。包覆大大提升了荧光粉在水中的稳定性。包覆一定厚度的氧化铝对发光性能有所提升并可以略微降低荧光粉的色温。
中图分类号:
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