关键词: 真空应用设备, 真空检漏方法, 氦质谱检漏仪, 喷吹检漏法

Abstract: In this paper, the principle of the leak detection technology of helium mass spectrometer and blowing leak detection method are briefly described. Taking the vacuum furnace as an example, several common leakage problems in practical production were analyzed in detail and corresponding solutions were made.

Key words: vacuum application equipment, vacuum leak detection method, helium mass spectrometer leak detector, blowing leak detection method