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真空 ›› 2023, Vol. 60 ›› Issue (1): 42-45.doi: 10.13385/j.cnki.vacuum.2023.01.07

• 真空获得与设备 • 上一篇    下一篇

低温高真空环境下气体吸附材料吸气性能测试系统设计

李晓刚1, 胡勇1, 高峰1, 胡湘娥1, 甘智华2   

  1. 1.中山凯旋真空科技股份有限公司,广东 中山 528478;
    2.浙江大学制冷与低温研究所,浙江 杭州 310013
  • 收稿日期:2022-07-14 出版日期:2023-01-25 发布日期:2023-02-07
  • 作者简介:李晓刚(1980-),男,陕西省宝鸡市人,硕士,工程师。
  • 基金资助:
    *广东省重点领域研发计划项目资助(2021B0101300004)

Design of Gas Adsorption Performance Measurements at Low Temperature and Low Pressure

LI Xiao-gang1, HU Yong1, GAO Feng1, HU Xiang-e1, GAN Zhi-hua2   

  1. 1. Zhongshan Kaixuan Vacuum Science & Technology Co., Ltd., Zhongshan 528478, China;
    2. Institute of Refrigeration and Cryogenics, Zhejiang University, Hangzhou 310013, China
  • Received:2022-07-14 Online:2023-01-25 Published:2023-02-07

摘要: 设计了利用动态法原理测试气体吸附材料吸气性能的系统,可以实现在15~500K温度范围,高真空(5.0×10-4Pa)至几个大气压压力范围内精确测量多种材料对不同气体的瞬时吸气速率、阶段气体吸附量、累积饱和吸附量等参数。研究表明该测试系统具有本底真空度高、结构合理紧凑、测试数据精确可靠的特点。

关键词: 气体吸附材料, 低温高真空, 系统设计

Abstract: A system is designed to test the gettering performance of gas adsorption materials by using the principle of dynamic method, which can achieve high vacuum(5.0×10-4Pa) to several atmospheres in the temperature range of 15-500K, measure the instantaneous adsorbing speed, adsorption capacity and saturation gas capacity of various materials for different gases accurately. The test results show that the system has the characteristics of high background vacuum, reasonable and compact structure, and accurate and reliable test data.

Key words: gas adsorption material, cryogenichigh-vacuum, system design

中图分类号: 

  • TB771
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