一种基于钽阳极块体积收缩的高真空热处理炉校温方法研究*

doi:10.13385/j.cnki.vacuum.2026.04.08

真空 ›› 2026, Vol. 63 ›› Issue (4): 52-57.doi: 10.13385/j.cnki.vacuum.2026.04.08

一种基于钽阳极块体积收缩的高真空热处理炉校温方法研究^*

李少军^1,2, 李仲香^1,2, 陈学清^1,2, 杜威¹, 桂愉平¹, 李琦凡¹

1.宁夏东方钽业股份有限公司,宁夏石嘴山 753000;
2.稀有金属特种材料全国重点实验室,宁夏石嘴山 753000

收稿日期:2025-09-18 发布日期:2026-07-27
通讯作者: 李仲香,硕士,正高级工程师。
作者简介:李少军（1974-）,男,本科,中级职称。
基金资助:
^*宁夏自然科学基金资助项目（2025AAC031063）

Study on Temperature Calibration Method for High-Vacuum Heat Treatment Furnace Based on Volume Shrinkage of Tantalum Anode Blocks

LI Shaojun^1,2, LI Zhongxiang^1,2, CHEN Xueqing^1,2, DU Wei¹, GUI Yuping¹, LI Qifan¹

1. Ningxia Orient Tantalum Industry Co., Ltd., Shizuishan 753000, China;
2. National Key Laboratory of Rare Metal Special Materials, Shizuishan 753000, China

Received:2025-09-18 Published:2026-07-27

摘要/Abstract

摘要： 针对高温高真空热处理炉在钽粉烧结过程中存在的温度稳定性与均温性问题,本研究提出了一种基于钽电解电容器阳极块体积收缩特性的新型校温方法。通过压制特定规格的钽阳极块（1 g钽粉,直径6 mm,压制密度5.5 g/cm³）,在1 500~2 000℃烧结条件下,结合高斯分布3σ原则建立体积收缩比控制模型。实验结果表明：该方法能有效监测炉膛前、中、后区域温度偏差,当体积收缩比超出置信区间时,提示热电偶衰减需及时更换。与传统测温环校温法相比,该方法具有温度适应力强、精度高（±5℃）的特点,可为钽粉电容器级物料的烧结工艺优化提供可靠依据。

关键词: 钽粉, 高真空热处理, 体积收缩率

Abstract: Aiming at the problems of temperature stability and uniformity existing in the sintering process of tantalum powder in high-temperature and high-vacuum heat treatment furnace, this study proposes a new temperature calibration method based on the volume shrinkage characteristics of the anode block of tantalum electrolytic capacitors. By pressing tantalum anode blocks of specific specifications （1 g tantalum powder, with a diameter of 6 mm and a pressing density of 5.5 g/cm³）, under the sintering conditions of 1 500~2 000℃, a volume shrinkage ratio control model was established in combination with the 3σ principle of the Gaussian distribution. The experimental results show that this method can effectively monitor the temperature deviation in the front, middle and rear areas of the furnace. When the volume shrinkage ratio exceeds the confidence interval, it indicates that the thermocouple is attenuated and needs to be replaced in a timely manner. Compared with the traditional temperature calibration method using temperature measuring rings, this method has the characteristics of strong temperature adaptability and high precision （within ±5℃）, and can provide a reliable basis for the optimization of the sintering process of capacitor-grade materials of tantalum powder.

Key words: tantalum powder, vacuum heat treatment, volume shrinkage rate

中图分类号: TF841.6

李少军, 李仲香, 陈学清, 杜威, 桂愉平, 李琦凡. 一种基于钽阳极块体积收缩的高真空热处理炉校温方法研究^*[J]. 真空, 2026, 63(4): 52-57.

LI Shaojun, LI Zhongxiang, CHEN Xueqing, DU Wei, GUI Yuping, LI Qifan. Study on Temperature Calibration Method for High-Vacuum Heat Treatment Furnace Based on Volume Shrinkage of Tantalum Anode Blocks[J]. VACUUM, 2026, 63(4): 52-57.

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一种基于钽阳极块体积收缩的高真空热处理炉校温方法研究^*

Study on Temperature Calibration Method for High-Vacuum Heat Treatment Furnace Based on Volume Shrinkage of Tantalum Anode Blocks

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