Abstract: In this article, the selection of thin film materials, failure mechanism, mechanical properties test method and fatigue failure are reviewed. The influence of tensile bending on the microstructure of the film and the initiation, electrical properties, expansion and saturation of microcracks were analyzed. The effects of film material, grain size and film thickness on the fatigue life of thin film were summarized. On membrane surface, along the thickness direction and control of fatigue crack was discussed. It is shown that the future studies on mathematical modeling and film fatigue experiment need to be combined together for better results.

Key words: failure mechanism, mechanical properties test method, electrical properties