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VACUUM ›› 2019, Vol. 56 ›› Issue (2): 31-36.doi: 10.13385/j.cnki.vacuum.2019.02.06

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Study of the electron-stimulated desorption equipment

HUANG HUA-yan, LIU Fang   

  1. School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China
  • Received:2018-04-25 Online:2019-03-25 Published:2019-04-18

Abstract: Photo-stimulated-desorption is the synchrotron radiation beam line, which is different from the typical vacuum system. In the whole process of the Photo-stimulated-desorption, photoelectron and secondary electron play a major role in the excitation of adsorption gas on the surface of vacuum material.Theelectron-stimulating desorption equipment (ESD) is important in studying the electron-stimulating gaseswith different materials and processes. Through theoretical calculation and analysis based on the physical process of electron-stimulating desorption, this paper has developed an equipment for above-mentioned experiments in 400eV~1000eV electron energy, which provides the experimental basis for studying optimal processing and treatment process of material surface in vacuum.

Key words: Synchrotron radiation, Photo-stimulated-desorption, Electron stimulating, Vacuum chamber material

CLC Number: 

  • TB71+6
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