真空计在线校准系统的研制

doi:10.13385/j.cnki.vacuum.2021.03.11

Abstract

Abstract: In order to solve the problem for online calibration of vacuum gauge,an online calibration system of vacuum gauge is developed. The online calibration system of vacuum gauge solves the problem of wide range calibration by optimizing design, material and process treatment. Through the research of online calibration technology, the comparison method is adopted. Three high-precision baratrons and one high-precision ionization gauge are used as reference standard to solve the problem that the calibration conditions are basically the same as the application conditions, which can reduce the uncertainty in the process of value transfer and ensure the accuracy and reliability of measurement. The online calibration system can realize the online measurement of vacuum gauge in the range of 10⁵~10^-5Pa. The relative expanded uncertainty is not more than 13%.

Key words: vacuum gauge, online calibration, calibration system

CLC Number:

TB935

TIAN Hu-lin, YANG Zhen, BAI Xiang-chun, WEI Meng-meng, YAN Rui, WANG Huan, LU Yao-wen. Research of Online Calibration System for Vacuum Gauge[J].VACUUM, 2021, 58(3): 55-58.

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