大口径超长U型气体池研制与分析

doi:10.13385/j.cnki.vacuum.2021.06.10

Abstract

Abstract: In order to simulate the monitoring environment of the concentration of carbon dioxide in the atmosphere, a U-shaped gas pool with large diameter and long pipeline was designed, which can control the temperature of the gas pool at 20~40℃, the temperature control accuracy can reach ±0.5℃, and the pressure control accuracy is 2mbar. This article briefly describes the overall design of the system, and conducts temperature and pressure stability tests to verify the structure. The test results show that it has high-precision temperature control capability without forced cooling background, and the temperature control accuracy is better than ±0.5℃. At the same time, the vacuum degree is accurately controlled according to the pressure feedback closed loop, and the control accuracy meets the test requirements.

Key words: calibration gas pool, test analysis, PID control, temperature control

CLC Number:

V416.5

LIU Hai-jing, LI Can-lun, LU Tong-shan, SUN Cheng-kai, LI Zhuo-hui, QI Song-song, LIU Jia-lin. Development and Analysis of Large-diameter and Ultra-long U-shaped Gas Pool[J].VACUUM, 2021, 58(6): 55-58.

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