面向大空间建筑的氟化非晶碳薄膜性能调控方法研究*

doi:10.13385/j.cnki.vacuum.2023.06.07

Abstract

Abstract: Large-space building is an important component for the urban landscape. Moreover, it is an important carrier to show the characteristics of the city, highlight the style of the times, and inherit the history of the city. Fluorinated amorphous carbon(a-C：F) film is expected to be used as a facade modification material to improve the self-cleaning, anti-fog and anti-ice capability of large-space buildings. This paper introduces the radio frequency/direct current co-sputtering method of a-C:F film. The changes of microscopic morphology, surface roughness and chemical components with various sputtering power ratio are systematically analyzed. The effects of chemical composition and microscopic morphology on the wettability of a-C:F film are studied. The results show that a-C：F film grows in the island mode. When the graphite/polytetrafluoroethylene sputtering power ratio is increased from 0 to 1.25, the decreasing in the type and content of fluorine-containing components is the main reason for the enhancement of hydrophilicity of a-C：F film.

Key words: fluorinated amorphous carbon film, urban and rural construction, hydrophobic, microscopic morphology

CLC Number: O484;TN147

WU Xiao-hu, HU Shu-jie, SUN En-ze, ZHANG Xin, ZHAO Qi. Performance Regulation Approach of Fluorinated Amorphous Carbon Film for Large-space Building[J].VACUUM, 2023, 60(6): 42-46.

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Performance Regulation Approach of Fluorinated Amorphous Carbon Film for Large-space Building

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