干式真空泵在半导体及新能源领域的应用及发展趋势

doi:10.13385/j.cnki.vacuum.2024.03.01

Abstract

Abstract: As a mechanical vacuum pump, dry vacuum pump has the advantages of wide pumping speed range, no oil in the pumping chamber, no friction of components, low energy consumption and corrosion resistance. It has become the preferred vacuum acquisition equipment in microelectronics, semiconductor, precision machining, new energy equipment and other industries at present, because there is no oil or other working medium in the pump chamber, and it can provide a relatively clean vacuum environment. In this paper, the application scenarios of dry vacuum pump in semiconductor preparation and new energy equipment manufacturing industry are briefly described. The product characteristics of some dry vacuum pumps are explained. The development space and challenges of domestic dry vacuum pump industry are summarized.

Key words: dry vacuum pump, semiconductor preparation, LCD, photovoltaic power, lithium battery manufacturing

CLC Number: TB752

ZHANG Pi-xian, ZHANG Yi-chen, ZHAN Chun-ming, JIN Wei-da. Application and Development Trend of Dry Vacuum Pump in the Field of Semiconductor and New Energy[J].VACUUM, 2024, 61(3): 1-8.

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Application and Development Trend of Dry Vacuum Pump in the Field of Semiconductor and New Energy

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