VACUUM ›› 2024, Vol. 61 ›› Issue (3): 74-78.doi: 10.13385/j.cnki.vacuum.2024.03.13
• Thin Film • Previous Articles Next Articles
XIONG Tian-nong, GAO Peng, WANG Rui-sheng, REN Shao-peng, ZHAO Shuai-feng, YIN Xiao-jun
CLC Number: T-652.1
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