双螺杆真空泵内压缩转子结构研究现状*

doi:10.13385/j.cnki.vacuum.2022.04.06

Abstract

Abstract: Screw vacuum pump is widely used in semiconductor, coating, chemical and other industries owing to its ideal performance. The inner compression screw vacuum pump begins to compress the working gas during the gas delivery stage and has a series of outstanding advantages. This paper divides the internal compression screw rotor into two types of variable pitch and variable section,and the relevant research progress of their mathematic model design, performance analysis method and dynamic balance calculation is introduced respectively, which can provide a reference for the theoretical research of internal compression screw rotor.

Key words: screw vacuum pump, inner compression, variable pitch, variable cross section

CLC Number:

TB752

LIU Ming-kun, LI Dan-tong, XING Zi-wen. Research Progress of the Inner Compression Rotor Structure of Twin-Screw Vacuum Pumps[J].VACUUM, 2022, 59(4): 28-32.

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Research Progress of the Inner Compression Rotor Structure of Twin-Screw Vacuum Pumps

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