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VACUUM ›› 2020, Vol. 57 ›› Issue (6): 11-17.doi: 10.13385/j.cnki.vacuum.2020.06.03

• Thin Film • Previous Articles     Next Articles

Research Progress of Corrosion-Resistant and Conductive Films on Stainless Steel Substrate Prepared by Magnetron Sputtering

FENG Shen-shen, WANG Liang, LI Bin, YU Qing-zhou, GAN Shu-yi   

  1. School of Mechanical Engineering, Hefei University of Technology, Hefei 230009, China
  • Received:2020-07-30 Online:2020-11-25 Published:2020-11-30

Abstract: Tainless steel-based corrosion-resistant conductive films are widely used in fuel cell bipolar plates and other devices, which require high corrosion resistance and electrical conductivity, good mechanical properties, and low processing costs. However, it is difficult to have both corrosion resistance and electrical conductivity of the current stainless steel-based films. Realizing the reasonable matching of these two properties and reducing production costs are one of the key points in the commercialization of metal-based films. This paper systematically summarizes the research progress in the preparation of stainless steel-based corrosion-resistant conductive films by magnetron sputtering, and analyzes in detail the types of preparation materials and process parameters. At the end of the article, the development direction of stainless steel-based corrosion-resistant conductive film is also prospected.

Key words: corrosion resistant film, conductive film, stainless steel base

CLC Number: 

  • TG179
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