According to the current status of hot filament chemical vapor deposition(HFCVD) diamond film preparation equipment, most of the hot filaments are placed horizontally and are easily broken after carbonization and brittleness. Continuous preparation of CVD diamond films and low production costs cannot be achieved. It has shortcomings of high produce cost and low production efficiency. Based on the principle of HFCVD to prepare diamond films, using Solidwork three-dimensional design software for three-dimensional modeling, and combined with mechanical design software drawing, a type of diamond film continuous preparation HFCVD equipment was developed. The process flow of continuous is given, and diamond films with good quality are successfully grown in batches by using this equipment.

Aiming for studying the mechanism and regularity of the effect of sputtering cleaning process on the surface characteristics of substrates, the Hall ion source was used to generate argon ion beam to clean substrates. The surface characteristics of substrates after ion beam cleaning under different discharge voltage and the bonding strength of coatings were then compared after changing discharge voltage of ion beam by adjusting the vacuum degree. The results show that with the increase of vacuum, the discharge voltage of ion beam increased gradually, the contact angle of substrate decreased gradually, and the surface roughness of substrate decreased first and then increased. The bonding strength of the coatings increased gradually with the increase of ion beam discharge voltage, up to 60N. It can be a concluded that the substrate surface could obtain good wettability, ductility and cleanliness after high energy argon ion beam sputtering cleaning, which can effectively improve the bonding performance of the coating.

Tainless steel-based corrosion-resistant conductive films are widely used in fuel cell bipolar plates and other devices, which require high corrosion resistance and electrical conductivity, good mechanical properties, and low processing costs. However, it is difficult to have both corrosion resistance and electrical conductivity of the current stainless steel-based films. Realizing the reasonable matching of these two properties and reducing production costs are one of the key points in the commercialization of metal-based films. This paper systematically summarizes the research progress in the preparation of stainless steel-based corrosion-resistant conductive films by magnetron sputtering, and analyzes in detail the types of preparation materials and process parameters. At the end of the article, the development direction of stainless steel-based corrosion-resistant conductive film is also prospected.

The infrared temperature measurement of human body, the spectral characteristic parameters of the optical film filter of the imaging system, the film system design and the coating process are studied. According to the black body radiation theory, the infrared radiation spectrum distribution of the human body is calculated, and the filter spectral characteristic parameters are requiredcut-off wavelength 5.5 μm, transmission band 7μm~12μm, average transmittance is greater than 85%, cut-off band UV-5 μm, average cut-off background is greater than OD3. The single crystal silicon wafer is used as the substrate, and germanium and zinc sulfide are used as the coating materials. The filter film system is designed, and the vacuum plating process is proposed.

In this paper, Si-doped ZnSnO film(SZTO)was prepared by magnetron sputtering. The effect of Si element doping on the properties of the film samples was studied. The XRD diffraction patterns show that the films with different Si doping content are amorphous. The surface morphology of the film was characterized by atomic force microscopy. With the increase of Si content, the surface roughness of the film sample shows a monotonous increasing trend, and Si doping reduces the flatness of the film sample. The transmission spectrum test shows that the SZTO films doped with different Si content have higher transmittance in the visible light range. Doping with Si can improve the transmittance in the visible range and effectively increase the optical band gap of the ZTO film. The PL spectrum test shows that the intensity of the PL spectrum show different degrees of increase with the increase of Si doping concentration, and the broadening becomes wider, which indicates that some deep level defects are introduced into the Si-doped ZTO film samples.

In this work, the numerical calculation model for the graphite furnace fluid area of the vacuum high temperature heat treatment furnace is established. The numerical calculation model of the graphite furnace inside fluid was performed based on the CFD, the inner fluid field was analyzed, and the optimal solution of flow field structure is obtained by the analysis of different structure. This work may provide a theoretical basis for design.

Using the heat treatment processes of vacuum oil quenching and vacuum tempering, 42CrMo was heat treated, and its microstructure and wear resistance were analyzed. The research results show that the metallographic structure of the rotor after vacuum tempering is tempered sorbite that maintains the orientation of martensite. The wear modes under different loads include adhesive wear and abrasive wear. The higher the load, the more severe the abrasive wear. The wear form under 5N load is abrasive wear accompanied by adhesive wear. While under 10N load, it is mainly abrasive wear.

The "Gibbs free energy method" was used to study the thermodynamics of preparation CoP by Fe₂P or FeP and Co. The Gibbs free energy of the reactions varied from-20.265 kJ·mol^-1 to-75.444 kJ·mol^-1, and from 13.149 kJ·mol^-1 to-54.889 kJ·mol^-1, respectively, when the temperature is in the range of 298 K to 1500 K. It is possible to prepare CoP in the calculated temperature range. The relationships were obtained of the Gibbs free energy and the equilibrium constant with temperature of preparation of CoP by Fe₂P and FeP added Co. They were ΔG_T=-0.0462T-6.1592, and ΔG_T=-0.0558T+31.5781, lgK^θ=0.3389+0.0024, lgK^θ=-1.5346+0.0028 of reaction of(1)and(2), respectively, under the same temperature range. The minimum temperature is -133 K and 566 K of the preparation reaction of CoP by FeP, Fe₂P and Co, respectively. It provides thermodynamic parameters for experimental study.

Based on a brief review of the development history of the skull furnace and its power supply in China, the current status of this field was introduced, the development direction and technical difficulties were discussed, and the development trend was pointed out.

In this paper, the effect of electron beam smelting process on the surface quality of Ø100 Ta ingot is studied through experiment of adjusting the melting power at a fixed melting rate. The experiments results show that, when the melting speed is constant, the melting power is reduced, and the specific electrical energy is reduced, the surface of Ta ingots is prone to defects such as cold insulation and pinching. The melting power is too high, and the temperature of the molten pool is too high, resulting in overheating and overmelting. The microstructure is unfavorable and even produces severe metal tumor scars. When the vacuum of the electron beam melting furnace is 2×10^-2Pa, the melting speed is 30 kg/h, the melting power is 160kW, and the cooling time is 4h, which is beneficial to the diffusion and volatilization of impurity elements.

Single Langmuir probe processing system is a processing software based on LabVIEW, which uses a single probe to measure and diagnose the plasma discharge in accordance with the Maxwellian electron distribution. The system can eliminate the big error data through the Grubbs criterion. The Savitzky-Golay filter is used to smooth the V-I curve. The relevant parameters of plasma discharge are obtained by processing and calculating the curve of transition region after the ion current is removed. Using this system, we can make the complicated probe data processing work simple and accurate, which provides the practical application for Langmuir probe. The V-I curve of electron cyclotron wave resonance plasma discharge with power variation was processed by using this probe processing system and the accurate results were obtained.

The cylinder of professional setting is embodied in completely composite materials by wounding and demoulding. The composite material is porous and loose, which means it is essential to conduct research on their airtightness to prevent gas leakage in actual use and cause equipment failure. This paper mainly studies the detection method of cylinder sealability. Finally, a leak detection method was obtained by selecting different sealing methods, measurement method and error elimination methods. This method is to seal the out wall of the cylinder, fill the inner chamber with helium, and create a vacuum chamber inside the outer wall, where to use the helium mass spectrometer to detect the helium content. The method can effectively eliminate the interference of helium leakage from different sealing surfaces, which can also detect the airtightness of the cylinder without causing damage. Using this method, the cylinder leakage rate is on the order of 10^-10Pa·m³·s^-1 in a static environment.

Helium leak detection pre-packed box device is an important unit for the TVS-2M fuel rod to change from horizontal to plumb position. The charging device of the pre-packed box consists of a frame, lifting mechanism, jacking mechanism, material shifting mechanism, pushing mechanism, pre-packed box support frame and an electrical control. The frame is made of 8080 aluminum profile, with adjustable accessories such as feet. The lifting mechanism is equipped with a gearbox and drive by a stepping motor, on which an aluminum profile blanking frame is installed. The feeding mechanism adopts double linear motion design, which is divided into linear feeding and plumb bob lifting to avoid the deformation caused by rotation. The pusher mechanism is driven by two unequal cylinders at the same time and the pusher plate is made of polyethylene material. After the development of the equipment, the effect verification was carried out respectively, including the selection of 500 fuel rods for test, the manual inspection of the accuracy of the paddle of the pre-packed device for helium leak detection, and the timing of 330 fuel rods with a stopwatch. The above verification results are in line with or better than the design indicators, which indicates that the design of the device meets the requirements. The conclusion is as followsthe newly developed device can meet the requirements of the TVS-2M fuel rod pre-packed assembly, no scratch or scratch on the surface of the fuel rod after pre-packed assembly, and the accuracy of packing is 100%. It takes 25 minutes to load 330 fuel rods at a time.

The boron neutron capture therapy(BNCT) device consists of an ECR ion source, a low energy transmission line(LEBT), a 3.5 MeV radio frequency quadrupole accelerator(RFQ), a high energy transmission line(HEBT)and a target station. The article first introduces the composition of the BNCT vacuum system, compares the differences between the BNCT and CSNS ion source vacuum systems, and gives the HEBT vacuum system design scheme and gas production calculation method. Using the Molflow software, the static pressure distribution of the HEBT vacuum system and the dynamic pressure distribution during beam bombardment are calculated and compared with the current vacuum state.

The test principle,equipment,sample preparation, test method and data processing of activated carbon adsorption isotherm at low temperature and low pressure were introduced. The adsorption isotherms of CO_2, air, N_2, Ar, H₂ and He by DX-30 briquette, ZX-15 columnar anthracite and CH-1 coconut shell particles were tested at low pressure of liquid nitrogen temperature.The results show that the adsorption isotherms of activated carbon for CO_2, air, N₂ and Ar are Langmuir I isotherms, Freundlich isotherms for H₂ and concave type Ⅲ isotherms for He. Comparison of adsorption capacity：when the adsorption equilibrium pressure is 10^-2Pa, the maximum adsorption capacity of activated carbon for CO₂ is (10~120)cm³/g;for N₂, air and Ar, the next is (0.2~1.5)cm³/g;for H₂, it is only (1.5×10^-3~2.3×10^-3)cm³/g;for He, it is very weak, and the adsorption equilibrium pressure is less than 3×10^-5cm³/g at 10^-1Pa.The comprehensive adsorption capacity of the three activated carbons at liquid nitrogen temperature is：DX-30 type is slightly stronger, ZX-15 type is next, CH-1 type is slightly weaker. The adsorption isotherm in this paper can be used as a reference for the design of low temperature adsorption pump and cryogenic vessel.

The vacuum system and vacuum chuck are the key components for the vacuum pipe lifter in the pipeline construction,which play an important role in the pipeline construction hoisting,pipe laying and safety assurance. This paper briefly introduces the structure principle of the vacuum pipe lifter and usage characteristics,analyzes and determines the relevant design requirements and technical parameters of the vacuum pipe lifter according to the pipeline construction hoisting requirements and working conditions.The design of force configuration,transmission and vacuum chuck solves the safety problem that the vacuum chuck can still be maintained after the vacuum system loses power. After technical inspection and application,it meets the design requirements of vacuum pipe lifter.

The TC4 alloy powder for 3D printing was prepared using an electrode induction smelting gas atomization method (EIGA) apparatus, and the oxygen content of the powder was measured using an oxygen-nitrogen hydrogen analyzer. In this paper, the effects of vacuum degree, pressure increase rate and screening atmosphere on the oxygenation amount of TC4 powder were studied. The results show that effect on oxygenation amount of TC4 powder follows pressure increase rate>screening atmosphere>equipment vacuum. When equipment vacuum degree is 0.01Pa, pressure increase rate is 0.67Pa/h, sieved in glove box, the oxygenation amount of 15-53μm TC4 powder is 167 ppm.