基于LabVIEW的朗缪尔单探针数据处理系统

doi:10.13385/j.cnki.vacuum.2020.06.11

VACUUM ›› 2020, Vol. 57 ›› Issue (6): 48-53.doi: 10.13385/j.cnki.vacuum.2020.06.11

• Measurement and Control • Previous Articles Next Articles

Data Processing System of Single Langmuir Probe Based on LabVIEW

YIN Ji-ping¹, QIAO Hong², LIN Zeng^{1, 3}, BA De-chun^{1, 3}

1.School of Mechanical Engineering & Automation, Northeastern University, Shenyang 110819, China;
2.Shanghai Institute of Spacecraft Equipment, Shanghai 200240, China;
3.Key Laboratory of Implant Device and Interface Science of Liaoning Province, Shenyang 110819, China

Online:2020-11-25 Published:2020-11-30

Abstract

Abstract: Single Langmuir probe processing system is a processing software based on LabVIEW, which uses a single probe to measure and diagnose the plasma discharge in accordance with the Maxwellian electron distribution. The system can eliminate the big error data through the Grubbs criterion. The Savitzky-Golay filter is used to smooth the V-I curve. The relevant parameters of plasma discharge are obtained by processing and calculating the curve of transition region after the ion current is removed. Using this system, we can make the complicated probe data processing work simple and accurate, which provides the practical application for Langmuir probe. The V-I curve of electron cyclotron wave resonance plasma discharge with power variation was processed by using this probe processing system and the accurate results were obtained.

Key words: Single Langmuir probe processing system, LabVIEW, Grubbs criterion, Savitzky-Golay filter, electron cyclotron wave resonance plasma discharge

CLC Number:

O539

YIN Ji-ping, QIAO Hong, LIN Zeng, BA De-chun. Data Processing System of Single Langmuir Probe Based on LabVIEW[J].VACUUM, 2020, 57(6): 48-53.

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