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VACUUM ›› 2022, Vol. 59 ›› Issue (1): 59-63.doi: 10.13385/j.cnki.vacuum.2022.01.11

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Automatic Test of the Vacuum and Temperture Performance for Vacuum Equipment Based on Program

TIAN Hu-lin1,2, YU Rong1,2, LIU Wen-yi3, LIU Shou-wen4, WANG Huan1,2, YANG Zhen1,2, ZHANG Wei1,2, LU Yao-wen1,2   

  1. 1. Beijing Vacuum Measurement and Testing Technology Engineering Research Center, Beijing 100029, China;
    2. Beijing Orient Institute of Measurement and Test, Beijing 100086, China;
    3. Jilin Jiangji Special Industry Co., Ltd., Jilin 132000, China;
    4. Beijing Institute of Satellite Environmental Engineering, Beijing 100029, China
  • Received:2021-03-01 Online:2022-01-25 Published:2022-01-27

Abstract: In this paper, in order to solve the problem of the automatic testing of vacuum and temperature parameters of the vacuum equipment, a high-precision platinum resistance thermometer is arranged inside the as-tested equipment, and a high-precision full range vacuum meter is arranged at the vacuum interface of the equipment to realize accurate data measurement. The computer automatically collects the measurement data of vacuum and temperature through Labview program, so as to realize the automation of joint detection of vacuum and temperature parameters of the vacuum equipment.

Key words: Labview, vacuum equipment, metering system, automatic acquisition, high-precision

CLC Number: 

  • TB935
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