单侧涡旋干式真空泵内气体流动的CFD模拟

doi:10.13385/j.cnki.vacuum.2019.04.13

真空 ›› 2019, Vol. 56 ›› Issue (4): 53-58.doi: 10.13385/j.cnki.vacuum.2019.04.13

单侧涡旋干式真空泵内气体流动的CFD模拟

邓文宇, 段永利, 齐丽君, 孙宝玉

沈阳中北通磁科技股份有限公司,辽宁沈阳 110168

收稿日期:2018-09-25 发布日期:2019-08-22
通讯作者: 孙宝玉,博士,高级工程师。
作者简介:邓文宇（1982-）,男,广东省梅州市人,本科,高级工程师。

Computational Fluid Dynamics Simulation of Gas Flow in Single-side Dry Scroll Vacuum Pump

DENG Wen-yu, DUAN Yong-li, QI Li-jun, SUN Bao-yu

Shenyang General Magnetic Co., Ltd., Shenyang 110168, China

Received:2018-09-25 Published:2019-08-22

摘要/Abstract

摘要： 本文建立了单侧涡旋干式真空泵流动区域的数值计算模型,并基于CFD通用软件ANSYS-CFX和动网格技术建立了干式涡旋真空泵内瞬态流动的仿真模型,分析了泵内的工作过程,及存在“欠压缩”和“过压缩”时涡旋干泵内热场分布。为进一步研究干式涡旋真空泵的理论和设计问题进行了有益的尝试。

关键词: 涡旋干式真空泵, 单侧, 计算流体力学, 动网格技术, 数值模拟

Abstract: In this work, the numerical calculation model for the flow area of the single-side dry scroll vacuum pump is established. The numerical simulation of the transient flow inside the single-side dry scroll vacuum pump was performed based on the CFD general software ANSYS-CFX and dynamics mesh method. The working process of the pump was also analyzed, especially the thermal field distribution in the pump under under-compression or over-compression. This work provides a meaningful exploration for the further study of the theory and design of dry scroll vacuum pump.

Key words: Dry scroll vacuum pump, single-side, computational fluid dynamics, dynamics mesh method, numerical simulation

中图分类号:

TB752

邓文宇, 段永利, 齐丽君, 孙宝玉. 单侧涡旋干式真空泵内气体流动的CFD模拟[J]. 真空, 2019, 56(4): 53-58.

DENG Wen-yu, DUAN Yong-li, QI Li-jun, SUN Bao-yu. Computational Fluid Dynamics Simulation of Gas Flow in Single-side Dry Scroll Vacuum Pump[J]. VACUUM, 2019, 56(4): 53-58.

参考文献

[1] 杨静, 陈素君. 涡旋真空泵——种具有发展潜力的无油泵[J]. 真空, 2009,46(1):42-46.
[2] Troup A P, Dennis N T M. Six years of dry pumping: a review of experience and issues[J]. J. Vac. Sei. Technol. A Vac. Surf. Films 1991;9(3):2048e52.
[3] Lessard P A.Dry vacuum pumps for semiconductor process: guidelines for primary pump selection[J]. J. Vac. Sci. Technol. A Vac. Surf. Films 2000;18(4):1777e81.
[4] 巴德纯, 杨乃恒. 涡旋干式真空泵结构对抽气性能的影响[J]. 真空, 1999,36(1):8-11.
[5] Tu J Y, Yeoh G H, Liu C Q.Computation fluid dynamics: a practical approach[M]. In:Oxford: Butterworth-Heinemann; 2008. p. 1e27.
[6] Boulon O, Mathes R.Flow modeling of a Holweck pump stage in the viscous regime[J]. Vacuum, 2001,60(1-2):73-83.
[7] Cheng H P, Chen C J, Cheng P W.Computational fluid dynamics performance estimation of turbo booster vacuum pump[J]. Journal of Fluids Engineering, 2003, 125(3): 586-589.
[8] Cheng H P, Chiang M T.Pumping performance investigation of a turbobooster vacuum pump equipped with spiral- grooved rotor and inner housing by the computational fluids dynamics method[J]. Journal of Vacuum Science & Technology A (Vacuum, Surfaces, and Films), 2003, 21(4): 1458-1463.
[9] Wang X D, Dong J L.Numerical study on the performances of steam-jet vacuum pump at different operating conditions[J]. Vacuum, 2010, 84(11): 1341-1346.
[10] 张来平, 邓小刚, 张涵信. 动网格生成技术及非定常计算方法进展综述[J]. 力学进展, 2010, 40(4): 424-434.
[11] Tamura Y, Fuji K.Conservation law for moving and transformed grids. AIAA 93-3365, 1993.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

单侧涡旋干式真空泵内气体流动的CFD模拟

Computational Fluid Dynamics Simulation of Gas Flow in Single-side Dry Scroll Vacuum Pump

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 2

Metrics

本文评价

推荐阅读 0

[1]	李琳 , 李成明 , 杨功寿 , 胡西多 , 杨少延 , 苏宁 . 三层热壁金属有机化学气相外延流场计算机模拟[J]. 真空, 2019, 56(1): 34-38.
[2]	王晓冬, 吴虹阅, 张光利, 李赫, 孙浩, 董敬亮, TU Jiyuan. 计算流体力学在真空技术中的应用[J]. 真空, 2018, 55(6): 45-48.