真空 ›› 2021, Vol. 58 ›› Issue (5): 77-79.doi: 10.13385/j.cnki.vacuum.2021.05.13
陈家荣1, 王东辰2, 彭麦菊1
CHEN Jia-rong, WANG Dong-chen, PENG Mai-ju
摘要： 本论文展示了一种可调谐硅基外腔激光器,调谐范围在C波段（1540~1560nm）,该激光器使用端面直接耦合（edge coupling）方式将SOA（Semiconductor Optical Amplifier）与硅基Si3N4波导集成。通过设计硅基Si3N4波导微环结构行成激光器外腔,激光器边模抑制比（side-mode suppression,SMSR）可达64dB。使用热调方式对微环进行等效折射率调节,实现了激光器粗调（coarse tune）与精调（fine tune）相结合,调节精度可达0.04nm。
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