微波表面波对管内壁沉积DLC薄膜的均匀性的研究

doi:10.13385/j.cnki.vacuum.2021.03.08

真空 ›› 2021, Vol. 58 ›› Issue (3): 39-44.doi: 10.13385/j.cnki.vacuum.2021.03.08

微波表面波对管内壁沉积DLC薄膜的均匀性的研究

周美丽¹, 施昌勇², 陈强³

1.山东工艺美术学院,山东济南 250001;
2.北京服装学院,北京 100029;
3.北京印刷学院,北京 102600

收稿日期:2020-04-11 出版日期:2021-05-25 发布日期:2021-06-01
通讯作者: 陈强,教授,博导。
作者简介:周美丽（1980-）,女,山东省济南市人,硕士。
基金资助:
*国家自然科学基金资助,项目号：（11775028, 11875090）; 北京市自然基金项目项目号（1192008）; 北京市教委项目项目号：（No. KZ202010015022,KM201910012004）

Study on DLC Coating Uniformity in the Tube Inner Wall Through Microwave Surface Wave Plasma Deposition

ZHOU Mei-li, SHI Chang-yong, CHEN Qing

1. ShanDong University of Art & Design,Jinan 250001,China;
2. Beijing Institute of Fashion Technology,Beijing 100029,China;
3. Beijing Institute of Graphic Communication,Beijing 102600,China

Received:2020-04-11 Online:2021-05-25 Published:2021-06-01

摘要/Abstract

摘要： 本文主要是开展对管状件内壁（如碳钢、聚酯PET瓶、塑料针筒等）采用微波表面波等离子体沉积薄膜的均匀性的研究。论文从沉积薄膜的工艺参数到微波耦合天线的设计对所沉积的纳米DLC薄膜均匀性的影响因素方面进行了探索,通过测量沿天线方向不同位置薄膜的沉积速率得到：影响微波等离子体沉积薄膜均匀性的因素主要是表面波强度的大小,Penning 放电只能改善区域性薄膜沉积,不能在整个天线范围增强放电、不能制备均匀的纳米薄膜。

关键词: 微波等离子体, 管状件, 纳米薄膜, 均匀性

Abstract: This paper reports the study on the uniformity of DLC coating deposited in the inner wall of tubal samples(such as carbon steel, PET bottle, plastic syringe) by microwave surface wave plasma. The main factors affecting the uniformity of as-deposited nanoscale coatings along the antenna direction were explored. By measuring the deposition rates of the coatings at different positions,it can be concluded that the generation and strength of surface wave dominate the uniformity of the DLC coating in the inner wall of tubes. Penning discharge can only affect the discharge characteristics regionally by the enhancement of the discharge, not the discharge model. Therefore, it is impossible to improve the uniformity of the coatings in the tube in whole antenna range.

Key words: microwave surface wave plasma, tubal sample, nano-thickness coating, uniformity

中图分类号:

TB753+.9

周美丽, 施昌勇, 陈强. 微波表面波对管内壁沉积DLC薄膜的均匀性的研究[J]. 真空, 2021, 58(3): 39-44.

ZHOU Mei-li, SHI Chang-yong, CHEN Qing. Study on DLC Coating Uniformity in the Tube Inner Wall Through Microwave Surface Wave Plasma Deposition[J]. VACUUM, 2021, 58(3): 39-44.

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微波表面波对管内壁沉积DLC薄膜的均匀性的研究

Study on DLC Coating Uniformity in the Tube Inner Wall Through Microwave Surface Wave Plasma Deposition

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