VACUUM ›› 2019, Vol. 56 ›› Issue (1): 63-66.doi: 10.13385/j.cnki.vacuum.2019.01.14
CHEN Wen, WANG Xian-you
CLC Number:
[1] | WANG Fu-zhen, CHEN Da-min, YAN Yuan-quan. The cleaning sources with argon ions using vacuum arc discharge technology [J]. VACUUM, 2019, 56(1): 27-33. |
[2] | WANG Xiao-ran, MA Yan-bin, DUAN Ping, LI Ru-yong, ZHUANG Bi-hui, CUI Min, YUAN An-juan, DENG Jin-xiang. Effect of Mg doping concentration on Ga2O3 thin films prepared by RF magnetron sputtering [J]. VACUUM, 2018, 55(6): 68-72. |
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