等离子体辅助原子层沉积技术包覆硅基氮化物荧光粉的结果性能研究

doi:10.13385/j.cnki.vacuum.2019.04.05

Abstract

Abstract: A plasma-assisted atomic layer deposition method was used to conformally coat the Al₂O₃ films on the surface of silicon-based nitride phosphor powders by a vibrating fluidized bed. The surface composition, morphology and water resistance of the phosphors before and after coating were tested by the Fourier transform infrared spectroscopy, scanning electron microscopy, transmission electron microscopy and pH meter. The PL luminescence of the phosphor before and after coating was tested by a fluorescence spectrometer. The results show that the alumina is conformally coated on the surface of the phosphor particles. The coating greatly enhances the stability of the phosphor in water. A certain thickness of alumina coating improves the luminescence performance and slightly reduces the color temperature of the phosphor powders.

Key words: plasma-assisted atomic layer deposition, coating, silicon-based nitride phosphors

CLC Number:

TB34

ZHANG Zi-xin, LIU Zhong-wei, YANG Li-zhen, CHEN Qiang. Study on Performance of Silicon-Based Nitride Phosphors Coated by Plasma-Assisted Atomic Layer Deposition[J].VACUUM, 2019, 56(4): 19-23.

References

[1] 陈晖,李海利,张娜,等. 白光LED用硅基氮氧化物荧光粉的研究进展[J]. 功能材料,2017, 48(10):10042-10045.
[2] 林海凤,王海波,张瑞西,等. 白光LED用氮化物及氮氧化物红色荧光粉的研究现状[J]. 材料导报, 2010, 24(21):10-13.
[3] 王磊,汪涵涵,左晓钰,等. 溶胶—凝胶法制备的纳米SiO_2对铝酸锶的包覆研究[J]. 金属世界 2018,(3):31-33.
[4] George S M.Atomic layer deposition: an overview[J]. Chemical Reviews, 2010, 110(1):111-31.
[5] Zhou Z, Zhou N, Lu X, et al.Performance improvement by alumina coatings on Y3Al5O12:Ce³+ phosphor powder deposited using atomic layer deposition in a fluidized bed reactor[J]. Rsc. Advances, 2016,6(80):76454-76462.
[6] Kim H J, Kim H G, Kang I G, et al.Atomic Layer Deposition of MgO Nanofilms on BaMgAl10O17:Eu²+ Blue Phosphors[J]. Advances in Physical Chemistry, 2015:2011.
[7] Jarvis K L, Evans P J, Triani G.Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition[J]. Surface & Coatings Technology, 2018,337:44-52.
[8] Profijt H B, Potts S E, Sanden M C M V D, et al. Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities,Challenges[J]. Journal of Vacuum Science & Technology A Vacuum Surfaces & Films, 2011, 29 (5):050801-050801-26.
[9] Longrie D, Deduytsche D, Haemers J, et al.A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects[J]. Surface & Coatings Technology, 2012,213(12):183-191.
[10] Dominguez D, Tiznado H, Borbon-Nuñez H A, et al. Enhancing the oxidation resistance of diamond powder by the application of Al₂O₃ conformal coat by atomic layer deposition[J]. Diamond & Related Materials 2016,69: 108-113.
[11] Shestaeva S, Bingel A, Munzert P, et al.Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications[J]. Appl. Opt. 2017, 56(4):C47-C59.
[12] Shi L, Huang Y, Seo H J.Emission Red Shift and Unusual Band Narrowing of Mn²+ in NaCaPO₄ Phosphor[J]. Journal of Physical Chemistry A, 2010, 114(26): 6927-6934.
[13] Kim H S, Kim H J, Kim H S, et al. Improvement of Luminescent Properties of Phosphor Powders Coated with Nanoscaled SiO₂ by Atomic Layer Deposition[J]. Solid State Phenomena, 2007,124-126:375-378.
[14] Ju X, Li X, Yang Y, et al.Luminescence properties of core-shell structured SiO₂ @CaMoO₄:Eu³+ phosphor[J]. Journal of Solid State Chemistry, 2012, 187(8): 109-113.

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Study on Performance of Silicon-Based Nitride Phosphors Coated by Plasma-Assisted Atomic Layer Deposition

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