单侧涡旋干式真空泵内气体流动的CFD模拟

doi:10.13385/j.cnki.vacuum.2019.04.13

Abstract

Abstract: In this work, the numerical calculation model for the flow area of the single-side dry scroll vacuum pump is established. The numerical simulation of the transient flow inside the single-side dry scroll vacuum pump was performed based on the CFD general software ANSYS-CFX and dynamics mesh method. The working process of the pump was also analyzed, especially the thermal field distribution in the pump under under-compression or over-compression. This work provides a meaningful exploration for the further study of the theory and design of dry scroll vacuum pump.

Key words: Dry scroll vacuum pump, single-side, computational fluid dynamics, dynamics mesh method, numerical simulation

CLC Number:

TB752

DENG Wen-yu, DUAN Yong-li, QI Li-jun, SUN Bao-yu. Computational Fluid Dynamics Simulation of Gas Flow in Single-side Dry Scroll Vacuum Pump[J].VACUUM, 2019, 56(4): 53-58.

References

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Computational Fluid Dynamics Simulation of Gas Flow in Single-side Dry Scroll Vacuum Pump

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