Abstract: The third-generation synchrotron requires to design a vacuum box with different shapes at different locations to ensure that the electron beam operates in an ultrahigh vacuum (<1.3E-8Pa) environment. As one of the key parts of the third-generation synchrotron device, the surface treatment of the material is the key problem in the manufacturing process. However, the surface treatment technology for 316LN special-shaped vacuum box of ultrahigh vacuum has not been published at home and abroad, and the research on the surface treatment technology of 316LN special-shaped vacuum box of ultrahigh vacuum has rarely been reported. Therefore, this paper puts forward a reasonable process plan for 316LN special-shaped vacuum box of ultrahigh vacuum surface treatment process, and designs and sets up a complete set of four-pole mass spectrometry residual gas detection and analysis system for 316LN special-shaped vacuum box of ultrahigh vacuum surface treatment process. It provides a theoretical basis for the study of the treatment of 316LN type vacuum box with ultra-high vacuum indication.

Key words: special-shaped vacuum box, ultra high vacuum, surface treatment, technological