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VACUUM ›› 2020, Vol. 57 ›› Issue (1): 21-25.doi: 10.13385/j.cnki.vacuum.2020.01.04

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Study of Design and Measurement for Variable Filter

WANG Zhong-lian, REN Shao-peng, YIN Xiao-jun, WANG Rui-sheng, GAO Peng, BAN Chao, HU Wen-wen   

  1. Shenyang Academy of Instrumentation Science CO., LTD., Shenyang 110043, China
  • Received:2019-09-03 Online:2020-01-25 Published:2020-03-17

Abstract: The variable filter is designed based on the principle of film thickness and wavelength variable. The fabrication of variable filter based on reactive magnetron sputtering coating machine was introduced, and the correction mask with variable film thickness is designed. The measurement of variable filter is discussed.

Key words: variable filter, correction mask with variable film, magnetic sputtering, measurement of variable spectrum

CLC Number: 

  • O436
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