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VACUUM ›› 2021, Vol. 58 ›› Issue (5): 77-79.doi: 10.13385/j.cnki.vacuum.2021.05.13

• Measurement and Control • Previous Articles     Next Articles

Research on Silicon-Based Tunable External-Cavity Laser

CHEN Jia-rong, WANG Dong-chen, PENG Mai-ju   

  1. 1. School of Materials Science and Engineering, Guizhou Min Zu University, Guiyang 550025, China;
    2. Nanjing Electronic Devices Institute, Nanjing 210016, China.
  • Received:2021-01-22 Online:2021-09-25 Published:2021-09-23

Abstract: In this paper, a silicon-based tunable external cavity laser with tuning range of 1540~1560nm was presented. The laser integrates SOA(Semiconductor Optical Amplifier)with silicon-based Si3N4 waveguide by edge coupling. The SMSR(side-mode suppression)of laser can reach 64dB by designing silicon-based Si3N4 waveguide micro-ring structure. The thermal tuning method is used to adjust the effective refractive index of the micro-ring. The combination of coarse tune and fine tune is realized. The adjustment accuracy can reach to 0.04nm.

Key words: external cavity laser, Si3N4 waveguide, semiconductor optical amplifier, side-mode suppression

CLC Number: 

  • TN256
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