This article briefly introduces the basic principles of relativity and quantum mechanics, which cites the recent scientific news to discuss the application and usage of vacuum science and technology in these fields. As we know(everyone knows, including the content that does not appear in the books), mother of the universe, vacuum is bigger than and older than the universe. Moreover,vacuum is the physical environment of relativity and quantum mechanics. Vacuum science and technology is an essential theory for the study of relativity and quantum mechanics. The morden physics is on the eve of a great revolution. The research problems of black holes, dark matter, dark energy, gravitational waves and the origin of particles have put forward serious challenges to physics. Perhaps physics can gain ground from studying scientific problems or resolving the contradictions between relativity and quantum mechanics. This article is divided into three parts: (1) The recent progress of relativity and vacuum technology. (2) Previous ideology frames were sorted out. (3) The relevant knowledge of quantum mechanics and zero point energy.

Recently, flexible electronics have attracted intensive interest owing to their potential applications in wearable devices with good flexibility, high integration, and high design ability. The research is developing on to the fatigue damage process and how to improve flexibility while keeping the excellent electrical performances now. In this article, the materials, electrical performance and fatigue failure of flexible electronics are systematically reviewed. First, the material properties and device characteristics are summarized. The charge transport and interfacial cracks of the devices are then compared and analyzed in detail. Particularly, the effects of tensile bending on the failure process of the film and the initiation, electrical properties, expansion and saturation of microcracks are mainly discussed. Three models of cracks can be mainly classified into open, sliding, and tear types. The loading rate has a critical point of brittle rupture and ductile fracture, which correspond to the crack of transgranular and intergranular, respectively. The structure stiffness positively correlating with crack necking is well understood. It is found that the fatigue damage is related to mechanical distortion, and the models verify that the tensile and bending can be well explained with this results. In the future, improving the matching between function layer and substrate, seeking new functional materials, expanding new monitoring method in fatigue failure, and developing noval integration technology of flexible devices will be the key directions in this filed. The studies on mathematical modeling and fatigue experiment need to be combined together, in order to prove guidance for the ultra-flexible and anti-fatigue electronic devices.

With the development of microelectronic technology, lithium-ion batteries and solar cells, especially the need of nano polymer films, are becoming higher and higher. Since the traditional deposition method can not meet the requirements, it is imperative to find a new method to deposit polymer. Molecular layer deposition(MLD) is a technique similar to atomic layer deposition, which can precisely control the thickness, composition, morphology and shape retention of polymer films. Therefore, MLD can be a new method to prepare polymer films. In this paper, the principle and method of MLD, as well as the development and application in the field of thin film preparation are reviewed. Finally, the challenges and prospects of MLD in the future are forecasted.

Linear plasma device(LPD) is an important platform for studying plasma and wall material interaction. It was presented that the design and test of vacuum system for a new LPD device, called material sputtering experimental device(MSED). The vacuum vessel is divided into two parts of plasma discharge vessel and material pretreatment vessel. The related experiments could be carried out in their own vessel without affecting each other. The test experiment is carried out by the new vacuum control system. The results show that the limit vacuum is 1.4×10^-5 Pa after a baking cycle, which meets the design requirements. The material samples could be transferred with the maximum distance of ~ 1800 mm. The stable and reliable operation of the vacuum system is benefit to the achievement of ultra-clean vacuum.

Vacuum vessels usually use O-ring rubber with rectangular sealing groove to achieve vacuum sealing. In this paper, the design of O-ring vacuum seal is introduced. The nonlinear finite element analysis models of two kinds of rectangular sealing groove of O-ring are established by ANSYS. The changes of Von Mises stress, contact stress and contact length of O-ring under different compression ratio and vacuum are studied. The change of vacuum leakage rate under different compression rate is calculated and analyzed. It may provide a basis for reliable design and performance optimization of O-ring vacuum sealing of vacuum vessel.

High speed and high reliability vacuum pumping system is needed for the electron beam melting furnace. This paper described the technical specification, the design ideas and methods, and structure configuration. A detailed calculation of the vacuum pumping system was carried out, which may provide a useful reference to develop similar vacuum equipment.

With the great progress of China′s aerospace and national defense industry, more and more key and special equipments need to be produced and tested in vacuum environment. Large simulation equipment began to be developed and put into use, and the requirements for vacuum gate valves, the key components, are becoming higher and higher. Due to vacuum flashboard valve diameter increasing, the structure of the traditional vacuum flashboard valve can′t meet the requirements, in view of the large diameter for this vacuum flashboard valve is the problem in use process, and the large diameter vacuum flashboard valve adopted fission body structure design, independent orbit design, automatic overpressure protection settings, add clutch transmission system, seal structure improvement and optimization, effectively solve the traditional vacuum flashboard valve structure, the insufficiency of control, etc. The open-mouth vacuum gate valve manufactured by optimized design has been put into operation, and the operation is stable and reliable. This design method can effectively solve the design problem of larger diameter vacuum gate valve in the future.

The tungsten oxide（WO₃） films on transparent conductive indium oxide glass were prepared by mid-frequency magnetron sputtering technique.The effect of sputtering pressure on the microstructure and optical properties of WO₃ thin films was studied.The composition and surface morphology of WO₃ films were analyzed by X-ray diffraction analysis and scanning electron microscopy.The electrochromic voltammetry,light modulation and cycle life of the WO₃ films were studied by electrochemical workstation and UV-Vis spectrophotometer.The chemical composition and oxidation state of WO₃ film in the state of coloring and bleaching were analyzed by X-ray photoelectron spectroscopy.The results show that the WO₃ films are all amorphous.With the increase of sputtering pressure,the morphology of WO₃ films structure becomes loose and rough,which is in favor of the intercalation/de-intercalation of Li⁺.The films deliver the fast response speed,wide amplitude modulation and excellent electrochromic performance,however,the poor cycling stability.When the sputtering pressure is 4Pa,the best electrochromic properties with the modulation amplitude of 81.0% at 550nm and coloring/bleaching response time of 7.8s/5.85s were obtained,which were well maintained after 1500 cycles.

In this work, pure β-Ga₂O₃ and Si-doped β-Ga₂O₃ thin films with different content were grown on Si(100)substrate and quartz substrate by radio frequency magnetron sputtering to study the influence of Si doping on the structure, surface morphology and optical properties of β-Ga₂O₃. The X-ray diffraction results showed that no new diffraction peaks were observed in all Si-doped β-Ga₂O₃ films,and the(111)diffraction peak gradually moved towards a larger angle with the increase of Si concentration. The X-ray photoelectron spectroscopy results indicated that Si was successfully doped in β-Ga₂O₃ films. The atomic force microscopy was used to study the surface morphology of films,and the results suggestedthat the roughness of films increased monotonously with the increase of Si content. The UV-visible light transmission spectrum tests showed that all films had the advantage of high transparency in visible region,while the optical band gap got larger with Si content increased. The band gap of β-Ga₂O₃ film can be adjusted after Si doping,which indicates Si is a potential dopant.

In order to improve the oxidation resistance of carbon materials, SiC coating was prepared on isostatic pressing formed graphite matrix by spraying method. The effects of the ratio of silicon to carbon in coating slurry on the phase composition, microstructure and oxidation resistance of SiC coating were studied. The results of XRD, SEM and oxidation experiments show that the SiC coating prepared by spraying method is mainly composed of 3C-SiC, C and a small amount of Si, and with the increase of the proportion of carbon powder in the reaction slurry, the infiltration ratio between the coating and matrix decreases gradually. When the ratio of silicon to carbon is 1∶0.3, sufficient SiC products can be formed on the substrate surface and the binding property is better. The oxidation weight loss rate of oxidation at 1500℃ for 120min is 7.5%.

Plasma atomization is considered as one of the most promising method for manufacturing spherical metal powders.However, because of the instability of the plasma jet generated by the key plasma torch, the uniform quality and fixed yield of spherical powders are not guaranteed. The instability of plasma jet mainly results from the large-scale shunting of the arc. In this paper, the experimental investigation of the plasma torch applied for plasma atomization was carried out and corresponding voltage signal was analyzed in time, frequency and time-frequency domains to judge the movement of arc root and reveal its static and dynamic volt-ampere characteristics, so as to realize the real-time monitoring of the working state of the plasma torch. The results show that the reverse polarity plasma torch has the rising volt-amperecharacteristics, with its arc voltage increasing with the increase of the arc currentand gas flow rate. The sawtooth wave of the arc voltage, caused by large-scale shunt, is a low frequency signal with the frequency in the range of 0.2~3Hz. The short time Fourier transformwas used to analyze the arc voltage signal in real-time, which can be used to accurately monitor the generation of large scale shunting and guide the adjustment of the working parameters of the plasma torch.

In order to find the main area where the contactor vibrates during operation, an experiment is designed to find the threshold condition for the contactor to enter the plume working condition. We confirm that when the ratio of“gas flow rate-discharge current” exceeds 10sccm/A, the contactor enter the plume working mode. In this area, the contactor will oscillate more severely, and the peak-to-peak discharge voltage generally exceeds 5V. According to FFT analysis, the cause of the discharge instability is the ionization instability when a smaller gas supply is inlet to generate more discharge current. The frequency component corresponding to this instability is about 1MHz. The more air flow rate, or the smaller discharge current can effectively suppress the occurrence of this kind of oscillation.

In this paper, a silicon-based tunable external cavity laser with tuning range of 1540~1560nm was presented. The laser integrates SOA(Semiconductor Optical Amplifier)with silicon-based Si₃N₄ waveguide by edge coupling. The SMSR(side-mode suppression)of laser can reach 64dB by designing silicon-based Si₃N₄ waveguide micro-ring structure. The thermal tuning method is used to adjust the effective refractive index of the micro-ring. The combination of coarse tune and fine tune is realized. The adjustment accuracy can reach to 0.04nm.

We studied the characteristics of control system and process safety requirements for vacuum coating equipment, and completed SIL evaluation, SIS design and SIL verification of equipment according to the IEC 62061 standard, completed the integration and application research of the whole SIS, and realized the information interaction and interlock protection between SIS and the main control system. The as-developed SIS has been used in a number of vacuum coating equipment and it effectively protects the safety of people and property.

This paper introduces a kind of closed cycle monitoring system for crucible cooling water supply with Siemens s7-1200 series PLC as the control core and WinCC 7.3 configuration software as the man-machine interface. The purpose is to provide a safe and reliable monitoring system for the closed cycle system for crucible cooling water supply. The system includes water pump, flow meter, pressure gauge, thermometer, electromagnetic valve, and pressure transmitter, etc., which can monitor and control the whole crucible cooling water supply closed circulation system in real time. The system has been running steadily online for many years, the control system is safe and stable, the man-machine interface is clear, the interaction is good, and the anti-interference ability is strong enough to meet the needs of online operation.

The influence of output value of fuel rod with paper barcode in helium leak detection process was explored. The fuel rods with laser bar code and paper bar code were selected as the control group and the experimental group, respectively. By analyzing the leakage rate output value, it was determined that the paper barcode had influence on the helium leakage detection output value of fuel rods. Based on experiment and analysis, the method to eliminate the false display caused by paper barcode is found. The following conclusions are drawn: the helium leak detection output value of fuel rod with paper barcode is high, close to the waste value; the main reason of helium leakage detection output value of the fuel rod is caused by paper barcode deflation and gas escape; by prolonging the evacuation time, the paper barcode has almost little influence on the helium leak detection output value of fuel rod, and does not cause misjudgment.

The“Gibbs free energy method” was used to study the thermodynamics of CoP₃ preparation by Fe₂P or Fe₃P and Co.The Gibbs free energy of the reactions varied from 196.12kJ·mol^-1 to 146.22kJ·mol^-1 and from 442.38kJ·mol^-1 to 399.21kJ·mol^-1, respectively, when the temperature is in the range of 298K to 1600K. It is impossible to prepare cobalt triphosphate CoP₃ in the calculated temperature range. The Gibbs free energy that the reaction to prepare cobalt phosphate and formation 3CaO · 2SiO₂ added appropriate amount of CaO and SiO₂ into the ferrophosphorus varied from -42.45kJ·mol^-1 to -108.42kJ·mol^-1 under the same temperature range. At the same time, the equilibrium constant of preparation of CoP₃ by Fe₂P is from 2.73×10⁷ to 1.03×10⁴ in the temperature range of 298K to 700K. The results show that it is not only feasible but also thorough that the CoP₃ can be prepared by adding Co and CaO and SiO₂ in ferrophosphorus under the temperature of 700K and in vacuum.It provides thermodynamic parameters for experimental study.

Aiming at the problem that titanium alloys are prone to fire under certain conditions,the fire resistance of titanium alloys was optimized. Ion implanted copper was carried out on the surface of Ti6Al4V, then the surface morphology was observed and analyzed by metallographic microscope, the phase composition of the implantation layer was analyzed by X-ray diffraction,the flame retardancy was studied by femtosecond laser ablation,and the morphology and composition of the ablation area were analyzed by scanning electron microscope. The injection layer containing Ti₂Cu alloy phase was formed on the surface of Ti6Al4V, and its microstructure was not significantly changed. Laser ablation of the sample, there is no Cu element in the ablation hole of the Ti6Al4V sample after treatment, Cu element exists in the surrounding area,and the area of ablation stain is reduced from 2.39×10⁴ μm² to 1.68×104μm² compared with the untreated Ti6Al4V. It indicates that the injection layer formed by copper injection is very thin and has flame retardant effect. With increase of energy and dose, the flame retardant effect becomes more obvious.

The ingot withdrawing device is one of the core components for the vacuum electron beam melting furnace, and its motion mode and speed have a significant effect on the stability of the withdrawing process and the structure of the ingot. Certain vibration can improve the surface quality and grain refinement of the ingot. Under the impact of vibration, the structure will generate additional deformation, and the strength of the related components also needs to be checked. In the pre-development stage, by combining the theoretical analysis of the simplified model and the simulation analysis of the real physical model, the vibration characteristics of the three-dimensional model for the vibrating ingot mechanism connecting table is studied. The vibration displacement amplification of the displacement sensor is analyzed, the optimization scheme is proposed to reduce the measurement error, and the strength of the structure is tested according to different working conditions. This work may provide some references for subsequent related structural design.