VACUUM ›› 2024, Vol. 61 ›› Issue (4): 17-21.doi: 10.13385/j.cnki.vacuum.2024.04.04
• Thin Film • Previous Articles Next Articles
LI Rui-dong1, JIN Da-li2, ZHANG Mei-dong1, YU Li-ping3, WANG Jian-wei4
CLC Number: O484.3
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