Through-silicon-via is currently a very popular high-density packaging technology, but the metallization of deep silicon holes in silicon through-hole technology is a very difficult process issue, because conventional magnetron sputtering techniques are difficult to deposit seed layers such as copper and tungsten in high aspect ratio silicon holes. Through simulation and calculation of the relationship between the two-dimensional non centered collision angles of copper atoms during oblique sputtering, it was found that when there is energy loss in atomic collisions, the angle of copper atoms incident into the silicon hole changes, which helps to deposit at the depth of the silicon hole. In this paper, copper seed layers were deposited in silicon blind holes with different aspect ratios by using negative bias assisted confocal sputtering of multiple copper targets to verify the feasibility of this method, and the deposition of copper seed layers in silicon pores with a depth to width ratio of 8:1 was successfully achieved by three target co sputtering.

The design of wafer heating plate has two core performance indicators: uniformity of working surface temperature and temperature control ability, and the wafer heating plates needs to be verified by multiple simulation iterations and tests before the design is finalized to determine that the product performance meets the design requirements. Based on the finite element calculation and system regression model, this study accurately predicts the actual required length, power density and corresponding layout scheme of the heater, and proposes a method to obtain the optimal solution with temperature uniformity as the goal. The verification results of different schemes show that the accuracy of the model is above 98%, which can greatly improve the design efficiency of heating plate and provide the possibilities for the application of artificial intelligence in the field of heating plate design. In addition, based on the theory of heat transfer, a design method for heating plate temperature control ability is proposed, which guides the design of heating plate temperature control ability through one-dimensional calculation.

Long wave pass filters are important optical components in Raman spectrometers that filter out Rayleigh scattering light, and higher steepness can further improve their detection accuracy and range. The design scheme of ultra-high steepness long wave pass film system and high-precision film thickness control technology of ultra-multiple film layers were introduced. The ultra-high steepness long wave pass film product manufacturing was achieved based on magnetron sputtering technology. The test results show that product has a steepness of better than 0.5% and a passband ripple of better than 4%, which can achieve a minimum of 100 cm^-1 low wavenumber Raman detection near 532 nm laser.

α-Se is an inorganic weak conductive material, and it is one of the most promising materials in the field of X-ray medical imaging and nondestructive testing, the carrier properties are of vital importance to its application. The α-Se intrinsic film was prepared under the condition of constant temperature, the surface microstructure and crystal structure of the film were tested using SEM and XRD. The effects of temperature, sampling resistance, and light pulse energy on the carrier mobility were studied by the time-of-flight method. The results show that in the temperature range of 298-338 K, the carrier transport of the α-Se is consistent with the shallow trap model. The carrier transit time is constant when the sampling resistance is not more than 5 kΩ and the optical pulse energy is not more than 3.5 μJ.

Transition metal nitride hard coatings are widely used for cutting tools, precision molds and mechanical parts. With the development of cutting technology and the increase of difficult-to-process materials, hard coatings have been continuously developed from traditional binary coatings to ternary coatings and quaternary coatings. The (Cr,Ti,Al)N quaternary coatings have attracted much attention because of their excellent comprehensive properties. Based on the basic principle and technical characteristics of magnetron sputtering deposition, this paper introduces the common magnetron sputtering deposition technology for the preparation of (Cr,Ti,Al)N coating, analyzes the effect of using elemental target and alloy target for deposition, and studies the influence of magnetron sputtering process parameters on the mechanical properties of (Cr,Ti,Al)N coating, and finally discusses the function and preparation method of (Cr,Ti,Al)N gradient coating. This paper may provide theoretical reference and guidance for designing the preparation process and improving the properties of (Cr,Ti,Al)N coating.

A design method for the vacuum system of a large series electron beam melting furnace is proposed to address the difficulty in selecting and designing the exhaust system. Firstly, calculate the effective pumping speed based on the gas load of the vacuum furnace body, roughly select the main pump, and then verify the pumping speed of the main pump using the effective pumping speed and the flow conductivity of the pumping system. Secondly, select the front stage of the main pump and the pre-extraction of the vacuum furnace body, and calculate their pumping speed. Then calculate the rough extraction time and high vacuum extraction time to verify the rationality of the selection. Finally, verify the designed electron beam melting furnace system through experiments. The results show that the designed furnace vacuum system has a slightly higher crude and high vacuum extraction time than the calculation time, and the ultimate vacuum degree is better than the design requirements. The calculated results of this method are highly consistent with the experimental results and can meet the design requirements of vacuum systems similar to the large vacuum melting furnace.

Higher stability, longer operating time and low vibration characteristics of pulse tube cryocooler （PTC） meet the requirements of high vacuum equipment and low-temperature pumps for cold sources, so PTC is increasingly popular in the field of low-temperature vacuum pumps. First, the basic principle and classification of PTC is introduced. And then, the latest development progress of PTC is summarized according to the driving mode. Finally, the advantages and disadvantages of different simulation methods in the development and optimization process are analyzed emphatically.

The large pumping speed and high capacity KDCP-16 cryopump independently developed by CSIC Pride Cryogenic Technology Co., Ltd. is introduced. The pumping speed and thermal load of the cryopump are theoretically calculated. The test methods of the main performance indexes (pumping speed, cool down time, gas capacity, crossover value) of KDCP-16 cryopump are introduced. The results show that the N₂ pumping speed of KDCP-16 cryopump is 6 550 L/s, the Ar pumping speed is 5 650 L/s, the cooling time is 110 minutes, the Ar gas capacity is 7 550 std·L, and the crossover value is 6.7×10⁴ Pa·L. The performance index of KDCP-16 cryopump is better than that of foreign cryogenic pumps of the same size.

To verify the overall operation reliability of the new designed piston compressor, finite element modal simulation and vibration response test were carried out on the compressor. First, a three-dimensional model of piston compressor was established, and then optimized. After the boundary conditions were set, a finite element modal simulation was conducted on the compressor, and the theoretical results of vibration response frequency on the compressor under this boundary condition were obtained. Afterwards, the compressor was tested for the vibration response at the critical speed, the real-time working modes of the first six steps of the compressor were obtained. The comparison between the finite element modal analysis and the empirical results demonstrats that there are some errors between them, but the results are consistent, and the destructive resonance would not occur in the new designed compressor.

The vacuum pump port of the high-power coupler warm window of the injector 1.3 GHz cryomodule of Shenzhen superconducting soft-X-ray free electron laser （S³FEL） is connected to the vacuum main via an angle valve for easy installation, leak detection and troubleshooting. In order to ensure that the ultimate pressure of the coupler warm window meets the standard before the cryomodule cools down, through theoretical calculation and software simulation, the ultimate vacuum degree that the coupler can maintain under different schemes were compared and verified. The results show that the ultimate vacuum degree of the untreated coupler tube A using a single ion pump does not meet the actual engineering indicator. After high-temperature baking of coupler tube A, its ultimate vacuum degree reaches the level of 10^-7 Pa, and is better than the actual engineering indicator. After setting up two ion pumps in coupler tube A, the ultimate vacuum pressure decreases by 50%, which can meet the engineering standards by further increasing the number of ion pumps.

The development of molecular pumps, detection methods and applications of volume flow rate are comprehensively discussed. The domestic and international standards for volume flow rate measurement of molecular pumps are introduced, and two volume flow rate test methods, the flow method and the orifice method are focuses on. Taking the FF-160/620C molecular pump as the object, the volume flow rate under specific pressure is measured by the two methods respectively. The principle, process, results and uncertainty are introduced in detail. It is concluded that the flow method has greater advantages when the flowmeter meets the requirements. Finally, the measurement methods and significance of molecular pumps in special working conditions, such as strong magnetic and corrosion-resistant environments, are introduced.

Aiming at the problem that the function design of the traditional space external heat flow simulation control system is single and cannot quickly meet the requirements of complex tests, a high-precision, low-cost and multi-purpose external heat flow simulation control system based on high-power power supply was designed. The system uses a parameter self-tuning PID controller. Through MATLAB numerical simulation and test debugging, the feasibility and reliability of the system design are verified. The results show that under different heating structures and operating conditions, the control system has fast response speed, small overshoot, good stability and robustness, and has achieved good control effects. It has been successfully applied in the space thermal vacuum environment simulation experiments.

The relationship between the displayed value of the leak detector and the helium concentration of the gas was derived theoretically and verified by experiments. In addition, the influence of helium concentration on the detection results of sniffer probe accumulation method was studied experimentally with large tank as the object. The results show that the displayed value of the leak detector is linearly related to the helium concentration of gas in the accumulation chamber when the temperature and inlet pressure are constant. While for sniffer probe accumulation method, the uniformity of helium concentration has a great influence on the detection results. The gas in the accumulation chamber must be stirred. After stirring for 10 min or more, the uniformity of helium concentration has little influence on the detection results with ensured reliability of tank leak detection.

In actual use, the helium leakage of the aerostat is much larger than the theoretical value, which greatly affects the standing performance of the aerostat. In this paper, the mechanism of helium leakage at the envelope welding area was discussed based on the errors between the calculated and actual helium leakage values. Helium permeability tests in the envelope welding area were conducted, and improvement ideas and methods were proposed. Aiming at the design of the long-endurance aerostat, the forming technology of the low helium aerostat capsule was optimized by studying the influence of different structural forms and technological methods of the envelope welding on the helium leakage rate. The results show that optimizing the structural form and processing methods of the airship envelope, such as applying protective outer heat-sealing strips on the outside of the envelope heat-sealing seams, or using heat-sealing processes as much as possible, the barrier and shape retention capabilities of the envelope can be effectively improved, and the standing time of the aerostat can be increased.

Copper coating is one of the main means to solve the anti-seize problem of threaded fasteners in vacuum vessel during the running of fusion reactor. This work briefly introduces the coating copper procedure and the solution to pitting-attacks on the copper coating. Meanwhile, to satisfy the high vacuum requirement, the orifice conductance method was used to test the outgassing rates of threaded fasteners with copper coating. The impact of copper coating, environmental temperature, and other factors on the material outgassing rate was analyzed in detail. The results show that the desorption gas is composed of hydrogen, water, nitrogen, CO₂, and the contained hydrogen rate does not meet the relevant requirements. This is bound up with coating copper process, test environment, test time and so on. It is necessary to control the test influential factors to achieve the anticipated outgassing rate requirements of material in vacuum vessel of fusion reactor.

Advanced ceramic materials have unparalleled structural characteristics such as high hardness, high modulus, high temperature resistance, corrosion resistance, as well as excellent functional properties such as thermal, optical and electrical properties. Therefore, they have been increasingly applied in fields of aerospace, information technology, national defense and military industry, biomedicine, and new energy. The demand for high performance advanced ceramic materials has driven the development of preparation processes. The application of vacuum technology in ceramic forming and sintering technology can improve ceramic properties by influencing on the densification, the uniformity of composition, and the distribution of grain sizes. This study summarized the application of vacuum technology in various forming and sintering methods, and discussed the mechanism of the effects of vacuum atmosphere on improving ceramic properties. Finally, prospects are made for future research directions.

Grinding is an important processing method in the post-treatment stage of titanium alloy castings. After grinding processing, the product can reach the desired shape, size, surface roughness and quality standards. However, titanium alloy has excellent properties different from the other metals, causing difficulties in the grinding and reducing processing. By describing the material properties of titanium alloy and the characteristics of different grinding processes, this paper lists and analyzes the main grinding processing methods and solutions of titanium alloy castings in the post-treatment stage in combination with the difficult points of titanium alloy grinding in the actual grinding processing, in order to give full play to the irreplaceable advantages of grinding processing in micro-grinding processing and the important supporting role in the field of aerospace technology.

Based on the requirements of eddy current testing for additive manufacturing, in view of the difficulty of signal interpretation and defect quantitative and qualitative analysis of eddy current testing, the finite element simulation technology was adopted to establish an eddy current testing model for surface defects of TC4 titanium alloy additive parts. The distribution of electromagnetic field inside and around the sample during the inspection process was obtained, the influence of the length, width and depth of defects on the magnetic field signal during the inspection was studied, and the experimental verification was carried out. The simulation results indicate that the detection signal gets stronger as the increase of the defect size in a certain range, and variations in the length, width and depth of defects will all affect the detection signal, which is in good coincidence with the experimental results.