干式螺杆真空泵的理论研究进展*

doi:10.13385/j.cnki.vacuum.2024.05.05

Abstract

Abstract: Due to the unique advantages such as wide working pressure range with high pumping speed, ability to remove water vapor and solid particle, and stable performance, dry twin-screw vacuum pumps have been widely used in popular industries such as semiconductors, petrochemicals, and photovoltaic new energy. They have broad market prospects and have attracted widespread attention. This article comprehensively summarizes the recent theoretical research progress of dry twin-screw vacuum pumps from the perspectives of screw rotor end profile design, variable pitch and profile internal compression design, dynamic balance design, computational fluid dynamics and thermodynamic performance analysis based on recent research papers and patents. This review can provide reference for research in the field of screw vacuum pumps.

Key words: screw vacuum pump, rotor profile, internal compression design, dynamic balance design, thermodynamic performance analysis

CLC Number: TB752

WU Jun, WU Jie, GAN Shu-yi, HE Hai-bin, WANG Lei, WU Qing-yun. Recent Theoretical Research Progress in Dry Screw Vacuum Pump[J].VACUUM, 2024, 61(5): 36-45.

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Recent Theoretical Research Progress in Dry Screw Vacuum Pump

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