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VACUUM ›› 2024, Vol. 61 ›› Issue (6): 38-42.doi: 10.13385/j.cnki.vacuum.2024.06.07

• Vacuum Acquisition System • Previous Articles     Next Articles

Segmented Integrated Vacuum Pumping System and Process Method

SUN Zhen-zhong1, SHI Min-hai1, CHEN Guang-qi1, WEI Yu-long1, WU Chen-rui1, WEI Hai-bo2   

  1. 1. Jiangsu Serlng New Energy Technology Co., Ltd., Jiangyin 214400, China;
    2. Liaoning Equipment Manufacture College of Vocational and Technology, Shenyang 110161, China
  • Received:2023-08-29 Online:2024-11-25 Published:2024-11-29

Abstract: By studying and analyzing the vacuum pumping system and process methods, a segmented integrated vacuum pumping system and process method was proposed. A system that integrates high, medium, and low vacuum pipelines, various types of vacuum units, and process control systems to achieve batch vacuum pumping of products. The computer-controlled vacuum pumping system automatically regulates the vacuum pumping process program for individual workpiece based on data collection of the process and data analysis and identification of the process database. The control system can also improve the process database and process procedures through statistical analysis of process data, thereby automatically identifying and regulating the process, prompting process parameters one by one, and providing suggestions for abnormal handling, achieving unmanned intelligent vacuum operation management. This system and process method can reduce equipment occupancy, reasonably allocate equipment operation and maintenance, improve equipment utilization, reduce energy consumption, and improve productivity and process quality.

Key words: vacuum acquisition, vacuum pumping process, process control, automation control

CLC Number:  TB751

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