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VACUUM ›› 2022, Vol. 59 ›› Issue (6): 29-33.doi: 10.13385/j.cnki.vacuum.2022.06.05

• Thin Film • Previous Articles     Next Articles

Influence of Cooling Structure on Vacuum Arc Source Temperature

LIU Xing-long1,2, SHEN Pei1,3, WANG Guang-wen1, YUE Xiang-ji1, LIN Zeng1,4   

  1. 1. School of Mechanical Engineering & Automation, Northeastern University, Shenyang 110819, China;
    2. Surfacility (Shenyang) Technology Limited, Shenyang 110027, China;
    3. NeuMat (Taian) Surface Technology Limited, Taian 271024, China;
    4. Key Laboratory of Implant Device and Interface Science of Liaoning Province, Shenyang 110819, China
  • Received:2022-01-11 Online:2022-11-25 Published:2022-12-05

Abstract: Vacuum arc ion plating is one of the most extensive surface treatment technologies in use now. However, in the actual industrial application, large surface particle of the prepared coating is still a major problem that plagues the advanced manufacturing. The reason lies on that the target is overheated, and then molten pool is formed to cause solution splash. The effective methods for reducing the occurrence of droplets include reducing the discharge power density, increasing the arc motion speed, as well as enhancing the cooling measures. In this paper, a numerical model was established for the arc source including new cooling structure and arc spot motion. The flow field of the cooling water inside the arc source and the temperature field of the arc source surface were simulated and analyzed, and the variation of the arc source under different boundary conditions was analyzed. The results in this paper may be helpful for the design of vacuum coating machine as well as the process development.

Key words: arc source, cooling structure, temperature field, target surface temperature

CLC Number: 

  • TB43
[1] TAKIKAWA H, TANOUE H.Review of cathodic arc deposition for preparing droplet-free thin films[J]. IEEE Transactions on Plasma Science, 2007, 35(4): 992-999.
[2] LANG W C, XIAO J Q, GONG J, et al.Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition[J]. Vacuum, 2010, 84(9): 1111-1117.
[3] 樊勇. 真空阴极弧离子镀的发展及应用[J]. 新技术新工艺, 2008(4): 93-96.
[4] 李彤, 刘艳明, 王晨, 等. 硬质涂层的研究热点及面临问题[J]. 真空科学与技术学报, 2018, 38(9): 755-763.
[5] 杨林生, 王君, 陈长琦. 硬质薄膜技术的最新发展[J]. 真空, 2009, 46(6): 35-39.
[6] 王福贞, 刘欢, 那日松. 离子镀膜技术的进展[J]. 真空, 2014(5): 1-8.
[7] 王福贞. 阴极电弧离子镀膜技术的进步[J]. 真空与低温, 2020, 26(2): 87-95.
[8] AKSYONOV D S, AKSENOV I I, ZADNEPROVSKY Y A, et al.Vacuum-arc plasma source with controlled cathode spot motion[J]. Problems of Atomic Science and Technology, 2008, 6: 210-212.
[9] HANTZSCHE E.Mysteries of the arc cathode spot: a retrospective glance[J]. IEEE Transactions on Plasma Science, 2003, 31(5): 799-808.
[10] JÜTTNER B. On the variety of cathode craters of vacuum arcs, and the influence of the cathode temperature[J]. Physica B+C, 1982, 114(2): 255-261.
[11] LI L H, ZHU Y, HE F S, et al.Control of cathodic arc spot motion under external magnetic field[J]. Vacuum, 2013, 91: 20-23.
[12] LANG W C.Design of a dynamic magnetic field steered cathodic arc source in arc ion plating[J]. Advanced Materials Research, 2011, 340: 167-172.
[13] AKSENOV I I, STREL"NITSKIJ V E, VASILYEV V V, et al. Efficiency of magnetic plasma filters[J]. Surface & Coatings Technology, 2003, 163: 118-127.
[14] WANG S, LIN Z, QIAO H, et al.Influence of a scanning radial magnetic field on macroparticle reduction of arc ion-plated films[J]. Coatings, 2018, 8(2): 49.
[15] 乔宏. 阴极电弧源的磁场优化设计及应用研究[D]. 沈阳: 东北大学, 2018.
[16] 毕凯, 陈大民, 李洪文. 电弧离子镀电弧源深入研究[J]. 真空, 2018, 55(3): 30-33.
[17] MARTIN R W, ZILM K W.Variable temperature system using vortex tube cooling and fiber optic temperature measurement for low temperature magic angle spinning NMR[J]. Journal of Magnetic Resonance, 2004, 168(2): 202-209.
[18] KUZNETSOV V G, BABUSHKINA E S.Mathematical modeling of the temperature distribution under the cathode spot of the vacuum arc[J]. Journal of Physics: Conference Series, 2016, 729(1): 012003.
[19] KIM J K, LEE K R, EUN K Y, et al.Effect of magnetic field structure near cathode on the arc spot stability of filtered vacuum arc source of graphite[J]. Surface & Coatings Technology, 2000, 124(2): 135-141.
[20] SONG X, WANG Q, LIN Z, et al.Control of vacuum arc source cathode spots contraction motion by changing electromagnetic field[J]. Plasma Science & Technology, 2018, 20(2): 115-121.
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