真空度测量仪动态校准系统

doi:10.13385/j.cnki.vacuum.2022.06.10

Abstract

Abstract: The vacuum tester can measure internal vacuum of the vacuum interrupter using the proportional relationship between ion current and pressure without disassembling it. The vacuum tester needs to be calibrated for different tube types before use. In this paper, the design of calibration system including installation of magnetic coil, shielding of strong magnetic fields, special lifting device for baking and carriage, and calibration theory are discussed. The calibration system consists of calibration chamber, ultra-high vacuum system, magnetic field coil, heating device, lifting system and vacuum tester. The basic principle of the calibration system is dynamic contrast method, with standard vacuum gauge, under the dynamic balance of pumping and charging, the data of standard vacuum gauge and ion current of the vacuum interrupter are obtained, then the calibration contrast curve is formed, which realizes the rapid, high-precision and wide-range calibration test.

Key words: vacuum interrupter, degree of vacuum, vacuum tester, dynamic calibration

CLC Number:

TB771

LU Shao-bo, ZHANG Ji-feng, HAN Yong-chao, YANG Kun, TANG Rong. Development of Dynamic Calibration System for Special Vacuum Tester[J].VACUUM, 2022, 59(6): 56-59.

References

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Development of Dynamic Calibration System for Special Vacuum Tester

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