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VACUUM ›› 2025, Vol. 62 ›› Issue (6): 70-79.doi: 10.13385/j.cnki.vacuum.2025.06.10

• Measurement and Control • Previous Articles     Next Articles

Research on Fault Diagnosis Method of Helium Leak Detection Equipment Based on Gray Scale Images of Time Series Data

QU Qilong1, DAI Cheng2, ZHANG Zhijun1, AI Shiyi1   

  1. 1. ULVAC Orient, Chengdu 611731, China;
    2. University of Electronic Science and Technology of China, Chengdu 611731, China
  • Received:2024-11-21 Online:2025-11-25 Published:2025-11-27

Abstract: Traditional fault diagnosis methods for helium leak detection equipment provide limited accuracy due to the inability to intuitively represent fault characteristics and heavy reliance on experts. A time series image generation scheme combined with the convolutional neural networks (CNN) is proposed for the sensor data of helium leak detection equipment, which performs data-driven analysis and fault classification on the fault data. Thereby, the faults of helium leak detection equipment can be diagnosed more accurately. Firstly, a more intuitive grayscale transformation was proposed to convert one-dimensional time series signals into grayscale images for visual representation, in order to adapt to different helium leak detection equipment fault diagnosis scenarios. Then, the LeNet-5 CNN model was optimized, and LeNet-5s CNN model with faster computing speed was designed to maximize recognition accuracy, and a dual model detection method was proposed for complex detection tasks. Finally, the effectiveness of the algorithms was verified through experiments. The results show that the improved model has a certain improvement in accuracy compared to the pre-improved one, and the dual model detection method has good recognition performance for all three types of faults in this complex detection task.

Key words: helium leak detection equipment, time series data, data processing, fault diagnosis, classification, deep learning

CLC Number:  TP391.4

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