欢迎访问沈阳真空杂志社 Email Alert    RSS服务

VACUUM ›› 2020, Vol. 57 ›› Issue (5): 11-13.doi: 10.13385/j.cnki.vacuum.2020.05.03

• Thin Film • Previous Articles     Next Articles

Structure and Optical Properties of MoS2 Thin Films Prepared by RF Reactive Magnetron Sputtering

WEI Xian-lu, GONG Chen-yang, XIAO Jian-rong   

  1. College of Science, Guilin University of Technology, Guilin 541004, China
  • Received:2019-07-20 Published:2020-11-06

Abstract: Molybdenum disulfide films were prepared under different pressures by RF reactive magnetron sputtering. The surface morphology, structure and optical properties of the films were characterized by scanning electron microscopy, X-ray diffractometry and UV-Vis spectrometer. The results show that the surface of MoS2 films prepared by RF reactive magnetron sputtering is smooth, uniform and compact with few defects. The films prepared under the deposition pressure of 1.2Pa shows the best crystallinity. The optical band gap of the films increases first and then decreases with the increase of deposition pressure. The optical band gap is the largest at 1.2Pa, which is 1.69eV. The change in the optical band gap of the film is caused by the change in crystallinity of the films and the formation of defects due to the deposition gas pressure.

Key words: molybdenum disulfide films, RF reactive magnetron sputtering, deposition gas pressure, crystal structure, optical band gap

CLC Number: 

  • TB43
[1] Meng Q, Jianrong X, Chen Y G.Thermal annealing effects on the electrophysical characteristics of sputtered MoS2 thin films by Hall effect measurements[J]. Semiconductor Science and Technology, 2019, 34: 045017.
[2] 李孟阁, 刘文文, 王龙飞, 等. 纳米二硫化钼的制备研究现状及展望[J]. 合成技术及应用, 2016, 31(1): 26-30.
[3] 张亨. 纳米二硫化钼的制备及性质研究进展[J]. 中国钼业, 2015, 39(3): 5-9.
[4] S ynthesis and characterization of large-area and continuous MoS2 atomic layers by RF Magnetron Sputtering[J]. Nanoscale, 2016, 8(7): 101039.
[5] Alam K, Lake R K.Monolayer Transistors Beyond the Technology Road Map[J]. IEEE TransactionsonElectron Devices, 2012, 59(12): 3250.
[6] Radisavljevic B, Radenovic A, Brivio J, et al.Single-layer MoS2 transistors[J]. Nature Nanotechnology, 2011, 6(3): 147-150.
[7] 魏争, 王琴琴, 郭玉拓, 等. 高质量单层二硫化钼薄膜的研究进展[J]. 物理学报, 2018, 67(12): 263-295.
[8] Novoselov K S, Geim A K, Morozov S V, et al.Electric Field Effect in Atomically Thin CarbonFilms[J]. Science, 2004, 306: 666-669.
[9] 夏万顺. 二硫化钼薄膜的制备及其光探测器研究[D]. 成都: 电子科技大学, 2018.
[10] 杨钊. 二硫化钼的制备及其光电特性研究[D]. 广州: 暨南大学, 2017.
[11] 邵红红, 陈威. 射频磁控溅射法制备二硫化钼薄膜[J]. 润滑与密封, 2007, 32(12): 43-46.
[12] 高斌基. 磁控溅射可控沉积MoS2基复合薄膜及其摩擦学性能研究[D]. 兰州: 兰州理工大学, 2018.
[13] Xiao J R, Qi M, Cheng Y, et al.Influences of nitrogen partial pressure on the optical properties of copper nitride films[J]. RSC Advances, 2016, 6: 40895-40899.
[1] LI Ru-yong, DUAN Ping, CUI Min, WANG Ji-you, YUAN An-juan, DENG Jin-xiang. Effect of post-annealing on Mg doped Ga2O3 films deposited by RF magnetron sputtering [J]. VACUUM, 2019, 56(3): 37-40.
[2] XU Jun-qi, LI Hou-jun, LI Mian, WANG Jian, SU Jun-hong, GOLOSOV Dmitriy A.. Optical and laser damage characteristics of TiO2 films prepared by thermal evaporation deposition technique [J]. VACUUM, 2019, 56(1): 39-44.
[3] WANG Xiao-ran, MA Yan-bin, DUAN Ping, LI Ru-yong, ZHUANG Bi-hui, CUI Min, YUAN An-juan, DENG Jin-xiang. Effect of Mg doping concentration on Ga2O3 thin films prepared by RF magnetron sputtering [J]. VACUUM, 2018, 55(6): 68-72.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
[1] LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2] ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3] LI Zhi-sheng. Development of ultra large shielded door for infrared calibration in simulated space environment[J]. VACUUM, 2018, 55(5): 66 -70 .
[4] ZHENG Lie, LI Hong. Design of 200kV/2mA continuous adjustable DC high voltage generator[J]. VACUUM, 2018, 55(6): 10 -13 .
[5] CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[6] SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[7] HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[8] JI Ming, SUN Liang, YANG Min-bo. Design of automatic sealing and locking scheme for lunar sample[J]. VACUUM, 2018, 55(6): 24 -27 .
[9] LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[10] LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
辽ICP备06004570号-4
Copyright © VACUUM, All Rights Reserved.
Tel: （024）24134406 24110136 24121929　Fax: （024） 24121929　E-mail: zkzk1964@126.com
Powered by Beijing Magtech Co. Ltd