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VACUUM ›› 2022, Vol. 59 ›› Issue (6): 29-33.doi: 10.13385/j.cnki.vacuum.2022.06.05

• Thin Film • Previous Articles     Next Articles

Influence of Cooling Structure on Vacuum Arc Source Temperature

LIU Xing-long1,2, SHEN Pei1,3, WANG Guang-wen1, YUE Xiang-ji1, LIN Zeng1,4   

  1. 1. School of Mechanical Engineering & Automation, Northeastern University, Shenyang 110819, China;
    2. Surfacility (Shenyang) Technology Limited, Shenyang 110027, China;
    3. NeuMat (Taian) Surface Technology Limited, Taian 271024, China;
    4. Key Laboratory of Implant Device and Interface Science of Liaoning Province, Shenyang 110819, China
  • Received:2022-01-11 Online:2022-11-25 Published:2022-12-05

Abstract: Vacuum arc ion plating is one of the most extensive surface treatment technologies in use now. However, in the actual industrial application, large surface particle of the prepared coating is still a major problem that plagues the advanced manufacturing. The reason lies on that the target is overheated, and then molten pool is formed to cause solution splash. The effective methods for reducing the occurrence of droplets include reducing the discharge power density, increasing the arc motion speed, as well as enhancing the cooling measures. In this paper, a numerical model was established for the arc source including new cooling structure and arc spot motion. The flow field of the cooling water inside the arc source and the temperature field of the arc source surface were simulated and analyzed, and the variation of the arc source under different boundary conditions was analyzed. The results in this paper may be helpful for the design of vacuum coating machine as well as the process development.

Key words: arc source, cooling structure, temperature field, target surface temperature

CLC Number: 

  • TB43
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