VACUUM ›› 2023, Vol. 60 ›› Issue (1): 23-29.doi: 10.13385/j.cnki.vacuum.2023.01.04
• Thin Film • Previous Articles Next Articles
QIN Li-li, DONG Mao-jin, FENG Yu-dong, HAN Xian-hu, CAI Yu-hong, WANG Yi, LI Xiao-jin, MA Feng-ying
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