亚纳米孔石墨烯复合薄膜新型标准漏孔制备及其渗氦性能研究*

doi:10.13385/j.cnki.vacuum.2024.01.03

Abstract

Abstract: The standard leak element is the essential calibration device for the helium mass spectrometry leak detector. To improve the sensitivity of the helium mass spectrometry leak detector, the lower leak limit of the standard leak element should be reduced. In view of the problem that it is difficult to reduce the lower leak limit of the standard leak element made of traditional materials by improving the processing technology. A new type of standard leak element based on subnanoporous graphene composite membranes was prepared using CVD method, and the helium permeation performance and preparation process stability were studied. The results show that the leak rate per unit area of single-layer graphene/PMMA composite membranes is 4.17×10^-12~1.09×10^-11 Pa·m³/(cm²·s·Pa), and the leak element with a lower limit leak rate of 10^-12 Pa·m³/s can be made by adjusting the penetration area of the composite membranes.

Key words: graphene, leak element, ultralow leak rate

CLC Number: TB774

LIU Zhao-xian, MENG Dong-hui, REN Guo-hua, ZHANG Xiao, HAN Yan, LIU Chu-yan, SUN Li-chen, YAN Rong-xin. Preparation and Helium Permeation Properties of New Leak Elements Based on Subnanoporous Graphene Composite Membranes[J].VACUUM, 2024, 61(1): 21-26.

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Preparation and Helium Permeation Properties of New Leak Elements Based on Subnanoporous Graphene Composite Membranes

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