多波段薄膜的波长误差补偿设计方法与应用*

doi:10.13385/j.cnki.vacuum.2024.06.02

Abstract

Abstract: The optical properties of multi-band thin films elements used in multispectral detection systems directly affect the detection and imagine quality of the system. In order to solve the technical problems caused by the deviation between the multi-band wavelength and the theoretical design spectrum in the process of film preparation, a wavelength error compensation design method was proposed. Combined with the development of 5-band laser film coating on multispectral ZnS optical window, the structure of the film system was designed by using the wavelength error compensation design method, and the film was prepared by vacuum evaporation technology. The experimental results were tested by spectrophotometer and infrared Fourier spectrometer. The results show that the transmittance curves of the multispectral ZnS optical window at five working bands after coating are highly consistent with the theoretical ones, which meet the technical requirements and verify the effectiveness of the wavelength error compensation design method.

Key words: multispectral detection, film preparation, wavelength error compensation, transmittance

CLC Number: TN305.8;TB79;TN29

WANG Song-lin, ZHANG Jian-fu, MI Gao-yuan, YIN Wan-hong, LIU Qing-long, ZHAO Hong-jun, ZHANG Xiang-ming. Design Method and Application of Wavelength Error Compensation for Multi-band Films[J].VACUUM, 2024, 61(6): 7-14.

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Design Method and Application of Wavelength Error Compensation for Multi-band Films

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