电子束设备蒸镀铝膜工艺的研究*

doi:10.13385/j.cnki.vacuum.2024.06.01

Abstract

Abstract: Using electron beam evaporation equipment to deposit high-quality aluminum film is a big challenge in the film process. Therefore, a method was proposed to deposit aluminum film by using a modified Al₂O₃ crucible as the lining pot, and adding materials and pre-melting them three times. The effects of different evaporation rates on the electrical resistivity, grain morphology and composition of aluminum films were studied. The results show that the convex molten aluminum liquid surface can increase the contact angle with the crucible wall, basically eliminate the aluminum oxide impurities in the aluminum film. With the increase of evaporation rate, the grain size of aluminum film increases and the average resistivity decreases. The aluminum film with purity of 99.9% and the lowest resistivity of 3.4×10^-6 Ω·cm can be prepared by adding materials for pre-melting three times.

Key words: electron beam evaporation, aluminum film, water-cooled crucible, alumina crucible

CLC Number: TB43

FU Xue-cheng, QU Min-ni, QUAN Xue-ling, WU Li-ying, WANG Ying, CHENG Xiu-lan. Study on Aluminum Film Evaporation Using Electron Beam Equipment[J].VACUUM, 2024, 61(6): 1-6.

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Study on Aluminum Film Evaporation Using Electron Beam Equipment

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