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VACUUM ›› 2019, Vol. 56 ›› Issue (3): 6-9.doi: 10.13385/j.cnki.vacuum.2019.03.02

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Design of a small-scale vacuum fabrication system specialized for studying organic light-emitting diodes

SUI Wen, ZHANG Chi, LI Jian-chang   

  1. Vacuum and Fluid Engineering Research Center, School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China
  • Received:2018-05-28 Published:2019-06-26

Abstract: A small-scale vacuum evaporation system specialized for organic light-emitting diodes (OLED) research was designed based on the advantages of worldwide OLED fabrication systems. The mask cassette, evaporation chamber, transition chamber and glove box were arranged in line. Organic thin films and electrodes for OLED devices with different structures can be deposited in-situ in the system, which satisfies the requirements of ultra-low water and oxygen content for device packaging. The system structure, core components and pumping system were analyzed and calculated.

Key words: OLED device, vacuum evaporation, glove box, OLED package

CLC Number: 

  • TB753+.2
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