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    1964年创刊(双月刊)
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Table of Content
25 May 2019, Volume 56 Issue 3
Vacuum system fault diagnosing and troubleshooting
JIANG Xie-chang
VACUUM. 2019, 56 (3):  1-5.  DOI: 10.13385/j.cnki.vacuum.2019.03.01
Abstract ( 463 )   Save
The vacuum pumping technologies are discussed and it will give years of reliable service when properly applied and operated. However, when troubleshooting is required, the fault diagnosing and applying correct solution can be equally as important.
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Design of a small-scale vacuum fabrication system specialized for studying organic light-emitting diodes
SUI Wen, ZHANG Chi, LI Jian-chang
VACUUM. 2019, 56 (3):  6-9.  DOI: 10.13385/j.cnki.vacuum.2019.03.02
Abstract ( 535 )   Save
A small-scale vacuum evaporation system specialized for organic light-emitting diodes (OLED) research was designed based on the advantages of worldwide OLED fabrication systems. The mask cassette, evaporation chamber, transition chamber and glove box were arranged in line. Organic thin films and electrodes for OLED devices with different structures can be deposited in-situ in the system, which satisfies the requirements of ultra-low water and oxygen content for device packaging. The system structure, core components and pumping system were analyzed and calculated.
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Thermodynamic calculation for pumping process in the trilobal Roots vacuum pump
ZHAI Yun-fei, ZHANG Shi-wei, HAN Feng, ZHAO Fan, XIE Yuan-hua
VACUUM. 2019, 56 (3):  10-15.  DOI: 10.13385/j.cnki.vacuum.2019.03.03
Abstract ( 674 )   Save
In this paper, the trilobal Roots pump is taken as the research object, starting from its basic structure and working principle, its internal gas transport process was analyzed thermodynamically. Taking the gas as the research object, the time sequence analysis was carried out, and the process of the gas in the pump was decomposed into intake, transport, recoil, discharge, and discussing the characteristics and mechanism of each stage in detail. The knowledge of thermodynamics and the amount of backflow were taken into account. Calculating gas backflow through model. The quantitative analysis of each phase was carried out, and the time-variation formulas of thermodynamic parameters were deduced, such as pressure, volume, mass, and internal energy. The formula was used to explore the relationship between exhaust power and import and export pressure.
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Development of vacuum thermal environment test system for deep space detector
WANG Fei, JING Jia-rong, LI Can-lun, QI Xiao-jun
VACUUM. 2019, 56 (3):  16-20.  DOI: 10.13385/j.cnki.vacuum.2019.03.04
Abstract ( 646 )   Save
Space environment simulation test is mainly used to simulate the cold-black environment, vacuum environment and solar radiation environment in space, which can verify the rationality of thermal and structural design of spacecraft. The effective space of the vacuum thermal environment test system for deep space detector is 3.35 meters in diameter and 5 meters in length. The equipment mainly includes vacuum vessel, heat sink, nitrogen system, vacuum-pumping system, external heat flux system, environmental monitoring system, measurement and control system. The ultimate vacuum of the equipment is 3.2×10-5 Pa, the average temperature of the heat sink is less than 80K, and the temperature homogeneity of the heat sink is 3.5K. The equipment has been used for several whole-spacecraft tests, the various technical indexes of the whole system are all superior to the design targets.
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Study on corrosion-resistance of Cr/CrN multilayers by arc ion plating
LI Hao, WANG Dong-wei, ZHANG Chuan, LIU Chan, HUANG Mei-dong
VACUUM. 2019, 56 (3):  21-26.  DOI: 10.13385/j.cnki.vacuum.2019.03.05
Abstract ( 569 )   Save
The Cr/CrN multilayer films are prepared to improve the corrosion resistance of the samples by arc ion plating. By controlling the deposition time of each Cr and CrN sublayer, the effect of the different modulation ratio on the Cr and CrN multilayer films is investigated from the microstructure and corrosion behavior. The results show that the multilayer has a suppressed effect on the coarse columnar structure by inserting the Cr layers, leading to a compact structure with lower porosity. Potentiodynamic polarization curves and electrochemical impedance spectroscopy results show that the Cr/CrN multilayer films exhibit an obvious corrosion potential increment of about 100mV, while the corrosion current density decreases more than one order of magnitude compared with that of the single CrN layer.
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Applications and research progress of field emission electron sources
LI Jian, TONG Hong-hui, DAN Min, JIN Fan-ya, WANG Kun, CHEN Lun-jiang
VACUUM. 2019, 56 (3):  27-31.  DOI: 10.13385/j.cnki.vacuum.2019.03.06
Abstract ( 1158 )   Save
Field emission electron sources have been found potential applications in X-ray tube, negative hydrogen ion source, display devices and other fields because of its several merits. In this paper, several applications of field electron emission are introduced firstly. Different field emission electron sources and their characteristics are compared and analyzed. Finally, the feasibility of using diamond like carbon film as cathode materials for field electron emission is analyzed on the basis of our experimental research. From the analysis i) it can be known that Spindt is difficult to fabricate and easy to be damaged; ii) carbon nanotube is the hottest issue in the current research because of its unique structure; iii) diamond like carbon film is easy to be synthesized and the composition can be adjusted. The advantages of both diamond and graphite in diamond like carbon film help it be the potential ideal field electron emission cathode material.
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Research on improvement of film surface defects of reflectors based on QFD and DOE
ZHAO Yun, MU Jia-li, LI Ming-hua, LI Wen-long, YAO Chun-long
VACUUM. 2019, 56 (3):  32-36.  DOI: 10.13385/j.cnki.vacuum.2019.03.07
Abstract ( 598 )   Save
In this paper, the optical reflector was chosen as the research object. The customer requirements on the optical reflector film quality and the quality flaw producted in production process were obtained by QFD. Combined with the optical mirror coating process, the demand in the form of quality house was transformed to process factors that affect the film surface defects of plating process for thin films. The design of key process factors and test process were optimization by using DOE test method. The results were analyzed by means of test and the range analysis method. The optimal combination of process parameters was thus obtained to prevent film surface defects. The experimental results show that the integrated improved model of QFD and DOE can achieve good practical application effect in the surface performance of reflector film.
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Effect of post-annealing on Mg doped Ga2O3 films deposited by RF magnetron sputtering
LI Ru-yong, DUAN Ping, CUI Min, WANG Ji-you, YUAN An-juan, DENG Jin-xiang
VACUUM. 2019, 56 (3):  37-40.  DOI: 10.13385/j.cnki.vacuum.2019.03.08
Abstract ( 312 )   Save
In this paper, high-quality Mg doped gallium oxide films were grown by Radio frequency magnetron sputtering (RF magnetron sputtering) with double target alternating sputtering. The as-prepared samples were annealed at 1000 C to explore the properties of Mg-doped Ga2O3 films before and after annealing. The XRD results show that the peaks of (004), (202) and (120) appear after annealing, and the peaks of (401), (601) and (122) become stronger. It is shown that post annealing can change the structure of Mg doped Ga2O3 thin films. After annealing, the AFM results show that the surface RMS roughness of the films increases from 1.36 nm to 17.11nm. The EDS results show that the weight percentage of Mg is increased after annealing. UV-visible transmission spectroscopy studies show that, after annealing, the average light transmittance of Mg doped Ga2O3 at the wavelength range of 200-1500nm reaches to 90% from 80%, the optical absorption edge of the film is blue-shifted and the band gap width becomes large, indicating that the annealing is helpful to improve the film structure and enhance light transmittance. From the photoluminescence spectra, we can see the photoluminescence peaks before annealing are almost negligible compared with that of the annealed films, which indicates that the annealing can significantly change the photoluminescence properties of Mg-doped Ga2O3 films.
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Application of self-cleaning anti-reflection coating in solar collector tube
ZHANG Fen-li, WANG Jie-feng, DENG Jing-lian, SUN Hui-fang
VACUUM. 2019, 56 (3):  41-43.  DOI: 10.13385/j.cnki.vacuum.2019.03.09
Abstract ( 255 )   Save
The dirt deposited on the surface of the solar collector tube directly affects the light transmittance, and then affects the heat collection efficiency of the vacuum tube. In this paper, a SiO2 coating was applied on the outer tube of a solar vacuum tube by sol-gel method. The results show that the coating has both anti-reflection and anti-fouling properties. The vacuum tube anti-reflection and self-cleaning functions were integrated, making the transmittance of the glass cover tube reach 96% in the sunlight range (300nm to 2600nm).
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Study on static cumulative comparison calibration method of vacuum leak
ZHAO Lan, CHENG Yong-jun, SUN Wen-jun, CHEN Lian, FENG Tian-you, JI Kang
VACUUM. 2019, 56 (3):  44-47.  DOI: 10.13385/j.cnki.vacuum.2019.03.10
Abstract ( 619 )   Save
Static cumulative comparison calibration method is compared variation of ion currents using quadruple mass spectrometer between standard gas flow by provided gas flow meter and leakage by provided calibrated vacuum leak during static accumulation, and leak leakage is gained. In this paper static cumulative comparison calibration method, apparatus principle, calibration results are introduced, and influence factor for reducing measurement uncertainty is provided.
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Reliability analysis of ZQJ-291H helium mass spectrometer leak detector based on FMECA
WANG Kai, CUI Yu-hao, LIU Sheng
VACUUM. 2019, 56 (3):  48-51.  DOI: 10.13385/j.cnki.vacuum.2019.03.11
Abstract ( 634 )   Save
This paper analyzed the different faults of various components of the ZQJ-291H helium mass spectrometer leak detector by means of the failure mode effect and hazard analysis method, and studied the influence on the working status of the system. It is intended to identify the weakness in the use of equipment and provides an effective basis for improving the reliability of this type of helium mass spectrometer leak detector in terms of design, manufacture and use. The results show that the main factors, which affect the reliability of the ZQJ-291H helium mass spectrometer leak detector are the degradation of the pump oil and the aging of the ion source. Therefore, it is recommended to increase the research efforts on the loss of ion source and thus improve the reliability of the leak detector.
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Vacuum cooling for food
SUN Qi-da
VACUUM. 2019, 56 (3):  52-56.  DOI: 10.13385/j.cnki.vacuum.2019.03.12
Abstract ( 601 )   Save
Vacuum cooling is developing as a new high technology for food in recent years. In this paper, the principal and application for fresh vegetable & fruit, fresh food and cooked food etc.,are described.
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Vacuum drying of American industrial hemp and its enlightenment to China vacuum drying industry
WANG Chuan-bo, DONG Hui
VACUUM. 2019, 56 (3):  57-59.  DOI: 10.13385/j.cnki.vacuum.2019.03.13
Abstract ( 644 )   Save
This paper introduces the application of vacuum drying equipment with scroll dry pump in the preparation of American industrial cannabis extract CBD (cannabisphenol). It combines the current situation of the domestic vacuum drying industry, and summarizes the experience of the US market for domestic vacuum drying with some inspirations for the industry.
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High-temperature working infrared detector Dewar heat load test technology
ZHANG Ya-ping, YANG Xiu-hua, HE Yin, HUANG Yi-bin, WANG Bo, WANG Yan, NIE Xi-liang
VACUUM. 2019, 56 (3):  60-65.  DOI: 10.13385/j.cnki.vacuum.2019.03.14
Abstract ( 699 )   Save
Based on the development of the high temperature working infrared detector Dewar module, the conduction heat load and radiation heat load, which influences the Dewar heat load index importantly, are analyzed and the improved method of Dewar design is proposed. The conventional method of Dewar leak test and the defects of Dewar heat load test under high operating temperature are analyzed. The vacuum protection calorimetry method is adopted to realize a reliable method for heat load detection of high working temperature type Dewar components, which can promote the development of three generations of infrared focal plane detector components.
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Numerical calculation of thermoacoustic engine with distributed parameter method
YANG Song, ZHANG Shi-qiang, ZHOU Jin, KONG Xiao-li, LI Hong-yu, ZHAO Wei
VACUUM. 2019, 56 (3):  66-70.  DOI: 10.13385/j.cnki.vacuum.2019.03.15
Abstract ( 451 )   Save
In this paper, the numerical simulation, which was illustrated by the case of the network model of travelling-wave thermoacoustic engine, was calculated by using distributed parameter method, and the construction dimension and operation condition of calculation model run parallel with experimental model. Based on linear thermoacoustics, it succeeded in obtaining the status of fluctuating pressure amplitude and volumetric flow rate amplitude in the thermoacoustic system through MATLAB programming. Then, the acoustic power flow amplitude was also calculated.
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Experimental study on heating molybdenum emitter by heat radiation
HAN Yong-chao, ZHANG Ji-feng, TANG Rong, SONG Yan-peng, YANG Kun
VACUUM. 2019, 56 (3):  71-74.  DOI: 10.13385/j.cnki.vacuum.2019.03.16
Abstract ( 414 )   Save
In this paper, the WRe3 heater is used to radiantly heat the molybdenum emitter in the thermionic energy converter. Firstly, the power loss of the emitter is calculated using numerical simulation. Secondly, the curve relationship between the heat power and the temperature is tested experimentally. The surface load of the heater in the experiment is analyzed. Suggestions for reducing the heater deformation and optimizing the experiment are put forward. This research has certain guiding significance for future experiments.
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