静态累积比较法真空漏孔校准方法研究

doi:10.13385/j.cnki.vacuum.2019.03.10

Abstract

Abstract: Static cumulative comparison calibration method is compared variation of ion currents using quadruple mass spectrometer between standard gas flow by provided gas flow meter and leakage by provided calibrated vacuum leak during static accumulation, and leak leakage is gained. In this paper static cumulative comparison calibration method, apparatus principle, calibration results are introduced, and influence factor for reducing measurement uncertainty is provided.

Key words: Static cumulative comparison, Vacuum leak, Calibration method

CLC Number:

TB774

ZHAO Lan, CHENG Yong-jun, SUN Wen-jun, CHEN Lian, FENG Tian-you, JI Kang. Study on static cumulative comparison calibration method of vacuum leak[J].VACUUM, 2019, 56(3): 44-47.

References

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Study on static cumulative comparison calibration method of vacuum leak

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