VACUUM ›› 2026, Vol. 63 ›› Issue (2): 1-12.doi: 10.13385/j.cnki.vacuum.2026.02.01
• Thin Film • Next Articles
YAN Jianjun, FANG Hongli, YUAN Chaowei, QI Xueyang, WANG Zhengduo, LIU Zhongwei
CLC Number: TB383
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