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真空 ›› 2020, Vol. 57 ›› Issue (6): 1-4.doi: 10.13385/j.cnki.vacuum.2020.06.01

• 薄膜 •    下一篇

金刚石薄膜连续制备的热丝化学气相沉积设备研制

刘鲁生, 翟朝峰, 杨兵, 宋昊哲, 于岐, 史丹, 袁子尧, 卢志刚, 陈滨, 周美琪, 李海宁, 喻彪, 黄楠, 姜辛   

  1. 中国科学院金属研究所,辽宁 沈阳 110016
  • 收稿日期:2020-09-07 出版日期:2020-11-25 发布日期:2020-11-30
  • 通讯作者: 姜辛,研究员;黄楠,副研究员。
  • 作者简介:刘鲁生（1979-）,男,山东省郓城县人,硕士,工程师。

Development of Hot Filament Chemical Vapor Deposition Equipment for Continuous Diamond Film Preparation

LIU Lu-sheng, ZHAI Zhao-feng, YANG Bing, SONG Hao-zhe, YU Qi, SHI Dan, YUAN Zi-yao, LU Zhi-gang, CHEN Bin, ZHOU Mei-qi, LI Hai-ning, YU Biao, HUANG Nan, JIANG Xin   

  1. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
  • Received:2020-09-07 Online:2020-11-25 Published:2020-11-30

摘要： 根据目前热丝化学气相沉积（Hot Filament Chemical Vapour Deposition, HFCVD ）金刚石薄膜制备设备现状：存在热丝多为水平放置碳化变脆后易发生断裂、不能实现CVD金刚石薄膜的连续制备、生产成本高及制备效率低等缺点,依据热丝化学气相沉积法制备金刚石薄膜的原理,应用Solidework三维设计软件进行三维建模,结合机械设计软件制图,研制出了该型金刚石薄膜连续制备HFCVD设备,并给出了连续镀膜的工艺流程,采用该设备成功批量生长出质量良好的金刚石薄膜。

关键词: 金刚石薄膜连续制备, HFCVD, 镀膜流程

Abstract: According to the current status of hot filament chemical vapor deposition(HFCVD) diamond film preparation equipment, most of the hot filaments are placed horizontally and are easily broken after carbonization and brittleness. Continuous preparation of CVD diamond films and low production costs cannot be achieved. It has shortcomings of high produce cost and low production efficiency. Based on the principle of HFCVD to prepare diamond films, using Solidwork three-dimensional design software for three-dimensional modeling, and combined with mechanical design software drawing, a type of diamond film continuous preparation HFCVD equipment was developed. The process flow of continuous is given, and diamond films with good quality are successfully grown in batches by using this equipment.

Key words: diamond film continuous preparation, HFCVD, coating process

中图分类号: 

  • TB79
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