双螺杆真空泵内压缩转子结构研究现状*

doi:10.13385/j.cnki.vacuum.2022.04.06

真空 ›› 2022, Vol. 59 ›› Issue (4): 28-32.doi: 10.13385/j.cnki.vacuum.2022.04.06

双螺杆真空泵内压缩转子结构研究现状^*

刘明昆, 李丹童, 邢子文

西安交通大学能源与动力工程学院,陕西西安 710049

收稿日期:2021-04-14 出版日期:2022-07-25 发布日期:2022-08-09
通讯作者: 邢子文,教授。
作者简介:刘明昆（1996-）,男,河南省信阳市人,博士生。
基金资助:
*国家自然科学基金资助项目（51976148）

Research Progress of the Inner Compression Rotor Structure of Twin-Screw Vacuum Pumps

LIU Ming-kun, LI Dan-tong, XING Zi-wen

School of Energy and Power Engineering, Xi′an Jiaotong University, Xi′an 710049, China

Received:2021-04-14 Online:2022-07-25 Published:2022-08-09

摘要/Abstract

摘要： 螺杆真空泵被广泛应用于半导体、镀膜、化工等行业,是一种理想的干式真空泵。其中内压缩式螺杆真空泵在气体输送阶段就开始对工作气体进行压缩,具有一系列突出优点。本文将内压缩式螺杆转子按结构分为变螺距与变截面两种,分别介绍了其数学模型设计、性能分析方法、动平衡计算等方面的研究进展,为内压缩式螺杆转子的理论研究提供了参考。

关键词: 螺杆真空泵, 内压缩, 变螺距, 变截面

Abstract: Screw vacuum pump is widely used in semiconductor, coating, chemical and other industries owing to its ideal performance. The inner compression screw vacuum pump begins to compress the working gas during the gas delivery stage and has a series of outstanding advantages. This paper divides the internal compression screw rotor into two types of variable pitch and variable section,and the relevant research progress of their mathematic model design, performance analysis method and dynamic balance calculation is introduced respectively, which can provide a reference for the theoretical research of internal compression screw rotor.

Key words: screw vacuum pump, inner compression, variable pitch, variable cross section

中图分类号:

TB752

刘明昆, 李丹童, 邢子文. 双螺杆真空泵内压缩转子结构研究现状^*[J]. 真空, 2022, 59(4): 28-32.

LIU Ming-kun, LI Dan-tong, XING Zi-wen. Research Progress of the Inner Compression Rotor Structure of Twin-Screw Vacuum Pumps[J]. VACUUM, 2022, 59(4): 28-32.

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双螺杆真空泵内压缩转子结构研究现状^*

Research Progress of the Inner Compression Rotor Structure of Twin-Screw Vacuum Pumps

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